Abstract:In our specific application of the van der Pauw (VDP) structure as a pressure sensor, where the stress field varies significantly, smaller VDP size is beneficial. The resistivity of the VDP sensor is affected by the stress state of the entire area over which it lies, providing a relation between resistance and the average stress in an area, rather than the stress at a point. The further the area over which the VDP lies is reduced, the closer we approximate the stress at a point rather than the average stress o… Show more
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