Design, fabrication and performances of MEMS piezoelectric energy harvester

Abstract

MEMS piezoelectric energy harvester is optimally designed and fabricated, and its vibration characteristics, output voltage, power, power spectral density (SD) and frequency response function under harmonic and random excitation is studied by theory analysis, simulation and experimental test. For the designed MEMS piezoelectric energy harvester, the accurate solutions and expressions of amplitude, voltage, power and power spectral density are derived. Then, vibration characteristic, voltage, power and power SD with different load resistance, sinusoidal acceleration and random acceleration SD are simulated and tested; moreover, frequency response function of MEMS piezoelectric energy harvester is obtained by experimental test, and the results are consistent with theoretical model. When sinusoidal acceleration is 0.6 g, the maximal amplitude of mass is 116 µm and the power density is 0.1 mW/cm 3 . By testing results, output voltage of piezoelectric energy harvester is proportional to the amplitude, and the amplitude at optimal load is smaller than of at open circuit because of the feedback effect of load resistance. In addition, output power SD linearly increases with acceleration SD increasing. When acceleration SD is 5 × 10 −4 (m/s 2 ) 2 /Hz, power SD is 1.24 µW 2 /Hz.

Output of MEMS Piezoelectric Energy Harvester of Double-Clamped Beams with Different Width Shapes

“…The geometric parameters of the harvester structure are listed in Table 2 where ζ is damping ratio, A is the amplitude of the excitation acceleration, L is the half length of all these three kinds of beam, a is the base width of all these three kinds of beam, b rect , b trapez , b parab are widths at center (x = L 2 ) of the half beam corresponding to the rectangular, trapezoid, and parabolic shapes, respectively. The damping ratio ζ is obtained by testing based on the principles of vibration mechanics [19]. When the excitation of the beam structure in the resonance state suddenly terminates, the vibration amplitude of the structure will attenuate as a logarithm function.…”

“…The damping ratio 𝜁 is obtained by testing based on the principles of vibration mechanics [19]. When the excitation of the beam structure in the resonance state suddenly terminates, the vibration amplitude of the structure will attenuate as a logarithm function.…”

Design and implementation of an energy harvester interface circuit using ultra-low power piezo bending generator

“…Revolution in this sector has opened many streams of researchers and engineers to look for new ways to utilize piezoelectric vibration transducer for the betterment of mankind. Nowadays piezo bending generator (PBG) systems are used in almost every field of life in which the basic and important functionality is the production of power from the vibration mechanism [5][6] [7]. The only limitation with vibrational mechanism is small energy level, so small up to milli or micro scale.…”

Integrated Power Supply for MEMS Sensor

“…With the development and progress of science and technology, information technology has already entered the era of micro-nano, and the emergence and development of large-scale integrated circuits have made great and rapid progress in computer technology, information technology, and control technology [1][2][3][4]. With the development of micro-nano-technology, the volume of the sensor becomes smaller and smaller, and the signal processing circuit becomes smaller and smaller.…”