“…There are three major means to the harvesting of kinetic energy: piezoelectricity [1][2][3][4][5][6], electromagnetic induction [7][8][9][10][11] and electrostatics [12], and the energy storage densities were discussed by Roundy et al [13]. The primary advantage of the electrostatic method is that it can be integrated into the MEMS process and so can be compact in size, while the main drawback is the small energy storage density.…”