Design, fabrication and performance characterizations of an integrated dual-axis tuning fork gyroscope

Abstract

This paper deals with the design, fabrication and preliminary experimental characterizations of a novel integrated dual-axis tuning fork gyroscope (DTFG). The DTFG is fabricated by high-aspect-ratio silicon-on-glass (SOG) process and vacuum packaged by glass frit bonding. Furthermore, a CMOS drive/readout ASIC chip, which is fabricated by a 0.25 µm 1P5M standard CMOS process, is integrated with the fabricated DTFG by directly wire-bonding. The experimental results of DTFG demonstrate that the rate sensitivities of Z-axis and X-axis sense modes are 1.47 mV/DPS and 0.18 mV/DPS respectively and the associated R2-linearity are 0.9995 and 0.9996. The noise-floors are 0.030 DPS/ Hz 1/2 and 0.247 DPS/Hz 1/2 for Z-axis and X-axis sense modes respectively.

The Development of Micromachined Gyroscope Structure and Circuitry Technology

“…Figure 9e shows an integrated dual-axis TFG (DTFG) designed by one research group of National Cheng Kung University [ 71 ]. The DTFG is fabricated by high-aspect-ratio silicon-on-glass (SOG) process and vacuum packaged by glass frit bonding.…”

Novel Structure of Double-H Tuning Fork for Dual-Axis Quartz Micro-Electro-Mechanical System Angular Rate Sensor

“…17) In addition, National Cheng Kung University, National Tsing Hua University, and the Industrial Technology Research Institute in Taiwan have also designed a multi-axis silicon MEMS angular rate sensor on a single chip, and have reported the performance of their prototypes. [18][19][20][21][22][23] Referring to the quartz multi-axis MEMS angular rate sensor, Custom Sensors & Technologies Company and Seiko Epson Corporation have manufactured high-performance IMUs. 15) Seiko Epson Corporation and Yamagata University have also designed a double-ended tuning fork multi-axis angular rate sensor on a single chip.…”