Design, Fabrication, and Experiment of a Decoupled Multi-Frame Vibration MEMS Gyroscope

Cao, Huiliang; Cai, Qi; Zhang, Yingjie; Shen, Chong; Shi, Yunbo; Liu, Jun

doi:10.1109/jsen.2021.3095762

Cited by 16 publications

(10 citation statements)

References 25 publications

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“…Therefore, the angular velocity of the rotating system can be obtained by detecting Coriolis force. Because the structure adopts an independent nested structure [11][12][13][14][15], the ring and wheel structures do not affect one another, and the motion equations [16][17][18][19][20] of the two structures are given, respectively:…”

Section: Mathematical Modelmentioning

confidence: 99%

Design and Fabrication of a Novel Wheel-Ring Triaxial Gyroscope

Guo

Wei

Cai

et al. 2022

Sensors

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This paper presents a new type of three-axis gyroscope. The gyroscope comprises two independent parts, which are nested to further reduce the structure volume. The capacitive drive was adopted. The motion equation, capacitance design, and spring design of a three-axis gyroscope were introduced, and the corresponding formulas were derived. Furthermore, the X/Y driving frequency of the gyroscope was 5954.8 Hz, the Y-axis detection frequency was 5774.5 Hz, and the X-axis detection frequency was 6030.5 Hz, as determined by the finite element simulation method. The Z-axis driving frequency was 10,728 Hz, and the Z-axis sensing frequency was 10,725 Hz. The MEMS gyroscope’s Z-axis driving mode and the sensing mode’s frequency were slightly mismatched, so the gyroscope demonstrated a larger bandwidth and higher Z-axis mechanical sensitivity. In addition, the structure also has good Z-axis impact resistance. The transient impact simulation of the gyroscope structure showed that the maximum stress of the sensitive structure under the impact of 10,000 g@5 ms was 300.18 Mpa. The gyroscope was produced by etching silicon wafers in DRIE mode to obtain a high aspect ratio structure, tightly connected to the glass substrate by silicon/glass anode bonding technology.

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Section: Mathematical Modelmentioning

confidence: 99%

Design and Fabrication of a Novel Wheel-Ring Triaxial Gyroscope

Guo

Wei

Cai

et al. 2022

Sensors

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“…In general, MEMS gyroscopes work on the drive mode by driving stiffness and drive damping, and the sense stiffness and sense damping are driven by the sensing mode to detect angular velocity when the Coriolis mass is subjected to an angular velocity of Z axis. The dynamic system can be represented by the simplified equations [27,28]. By solving Equation (1), the displacement of the MEMS gyroscope in the drive direction can be described as:…”

Section: Structure Of Mems Gyroscopementioning

confidence: 99%

Improved VMD-ELM Algorithm for MEMS Gyroscope of Temperature Compensation Model Based on CNN-LSTM and PSO-SVM

Wang

Cao

2022

Micromachines

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The micro-electro-mechanical system (MEMS) gyroscope is a micro-mechanical gyroscope with low cost, small volume, and good reliability. The working principle of the MEMS gyroscope, which is achieved through Coriolis, is different from traditional gyroscopes. The MEMS gyroscope has been widely used in the fields of micro-inertia navigation systems, military, automotive, consumer electronics, mobile applications, robots, industrial, medical, and other fields in micro-inertia navigation systems because of its advantages of small volume, good performance, and low price. The material characteristics of the MEMS gyroscope is very significant for its data output, and the temperature determines its accuracy and limits its further application. In order to eliminate the effect of temperature, the MEMS gyroscope needs to be compensated to improve its accuracy. This study proposed an improved variational modal decomposition—extreme learning machine (VMD-ELM) algorithm based on convolutional neural networks—long short-term memory (CNN-LSTM) and particle swarm optimization—support vector machines (PSO-SVM). By establishing a temperature compensation model, the gyro temperature output signal is optimized and reconstructed, and the gyro output signal with better accuracy is obtained. The VMD algorithm separates the gyro output signal and divides the gyro output signal into low-frequency signals, mid-frequency signals, and high-frequency signals according to the different signal frequencies. Once again, the PSO-SVM model is constructed by the mid-frequency temperature signal to find the temperature error. Finally, the signal is reconstructed through the ELM neural network algorithm, and then, the gyro output signal after noise is obtained. Experimental results show that, by using the improved method, the output of the MEMS gyroscope ranging from −40 to 60 °C reduced, and the temperature drift dramatically declined. For example, the factor of quantization noise (Q) reduced from 1.2419 × 10−4 to 1.0533 × 10−6, the factor of bias instability (B) reduced from 0.0087 to 1.8772 × 10−4, and the factor of random walk of angular velocity (N) reduced from 2.0978 × 10−5 to 1.4985 × 10−6. Furthermore, the output of the MEMS gyroscope ranging from 60 to −40 °C reduced. The factor of Q reduced from 2.9808 × 10−4 to 2.4430 × 10−6, the factor of B reduced from 0.0145 to 7.2426 × 10−4, and the factor of N reduced from 4.5072 × 10−5 to 1.0523 × 10−5. The improved algorithm can be adopted to denoise the output signal of the MEMS gyroscope to improve its accuracy.

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“…The MEMS gyroscope sensor can detect small changes in displacement, but it is also vulnerable to temperature changes that can alter the mass oscillation amplitudes of the sensor due to thermal expansion and thermomechanical stresses. External vibrations can interfere with the Coriolis force detection and cause mode coupling, frequency pulling, and amplitude saturation of the gyroscope modes [10][11][12][13].…”

Section: Introductionmentioning

confidence: 99%

Design and analysis of mode-matched decoupled mass MEMS gyroscope with improved thermal stability

Bashir,

Bazaz,

Saleem

et al. 2024

Meas. Sci. Technol.

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This paper presents an efﬁcient design approach for microelectromechanical systems (MEMS) gyroscope considering the design constraint of MEMSCAP's Silicon-on-Insulator Multi-User MEMS Processes (SOIMUMPs). A design for a decoupled mass MEMS resonant gyroscope with tuning electrodes is presented to minimize cross-axis coupling and optimize the gyroscope's performance. The device features a size of 1.8 ×2.772 mm^2. A decoupled mass MEMS gyroscope has been designed using a novel mechanical beam configuration that optimizes the structural design to reduce unwanted interactions between drive and sense axes motions. Mode order has been achieved by obtaining the first two modes as drive and sense modes at 9946.3 Hz and 10202.7 Hz, respectively. Parallel plate electrostatic tuning electrodes have been added to adjust and match the drive and sense modes at the resonant frequencies of 9946 Hz. This mode matching is crucial for optimizing gyroscope performance, accuracy, and sensitivity. The effects of temperature variation on the performance of the designed decoupled mass MEMS gyroscope have been investigated, particularly in terms of its mode-matched operation achieved using tuning electrodes. Finite Element Method (FEM) simulations were conducted, demonstrating that thermal stability was achieved, and mode-matched operation was maintained within the temperature range of -40 ºC to 80 ºC. The gyroscope exhibits enhanced performance compared to existing MEMS gyroscopes under mode-matched conditions, featuring a lower temperature coefficient of frequency (TCF) at 0.0415 Hz/ºC in the drive mode and 0.0165 Hz/ºC in the sense mode. FEM analysis for the fabrication process tolerances has been done, where MEMS gyroscope’s resonant frequencies, output capacitance, output displacement, and sense mode quality factor have shown negligible changes to fabrication process tolerances. Transient analysis was conducted using CoventorWare MEMS+ 3D schematic, which was integrated with MATLAB Simulink to measure the MEMS gyroscope’s output response, which corresponded with the varying input angular velocity signal.

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Design, Fabrication, and Experiment of a Decoupled Multi-Frame Vibration MEMS Gyroscope

Cited by 16 publications

References 25 publications

Design and Fabrication of a Novel Wheel-Ring Triaxial Gyroscope

Design and Fabrication of a Novel Wheel-Ring Triaxial Gyroscope

Improved VMD-ELM Algorithm for MEMS Gyroscope of Temperature Compensation Model Based on CNN-LSTM and PSO-SVM

Design and analysis of mode-matched decoupled mass MEMS gyroscope with improved thermal stability

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