Design, fabrication, and evaluation of on-chip micro-supercapacitors

Beidaghi, Majid; Chen, Wei; Wang, Chunlei

doi:10.1117/12.884350

Cited by 7 publications

(3 citation statements)

References 12 publications

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“…Miniaturized electronic devices, such as microrobots and implantable medical devices, require micropower sources with small dimensions (length scales in the micrometer range) and high power densities. Among these micropower systems, micro-batteries [43][44][45], MSCs [46], micro-fuel cells [47] and piezoelectric energy harvesters [48] have been explored in recent years. However, such types of micro-power devices cannot satisfy these requirements such as long-term electrochemical stability, excellent power density, fast charge/ discharge rate, etc.…”

Section: Importance Of Flexible Mscsmentioning

confidence: 99%

Status review on the MEMS-based flexible supercapacitors

Patil

Lee

2019

J. Micromech. Microeng.

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The development of high-performance miniaturized electrochemical energy storage systems is one of the important technological challenges for innovative electronic gadgets. Flexible microelectromechanical systems-based supercapacitors are considered one of the most aggressive on-chip power sources for advanced integrated electronics. Achieving high power efficiency with excellent flexibility and transparency for the micro-supercapacitors is a major challenge nowadays. Generally, these characteristics of micro-supercapacitors are dependent on the fabrication methods, electrical, mechanical and electrochemical properties of the microelectrode materials, current collectors and electrolytes. In the present review, we have summarized the various strategies used in materials engineering to develop flexible microsupercapacitors and their electrochemical performance characteristics. Meanwhile, this review presents the latest developments in the design, fabrication and application of flexible micro-supercapacitors.

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Section: Importance Of Flexible Mscsmentioning

confidence: 99%

Status review on the MEMS-based flexible supercapacitors

Patil

Lee

2019

J. Micromech. Microeng.

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“…Among the various types of manganese oxides, thin-film manganese oxide has the best capacitance performance. 10,11 At present, there are various methods to fabricate thin-film manganese oxide, such as oxidation-reduction, hydrothermal, sol-gel method, thermal decomposition and electrochemical deposition. [12][13][14][15][16][17][18][19] Among them, electrochemical deposition has the advantages of simple process and low cost, and it can deposit manganese oxide on the three-dimensional microstructure to form electrodes directly.…”

Section: Introductionmentioning

confidence: 99%

Preparation and characterization of manganese oxide microelectrodes for microelectromechanical system supercapacitor

Wen

Zhang

You

et al. 2013

Proceedings of the Institution of Mechanical Engineers, Part N:

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The capacity of charge storage for supercapacitor depends on the size of the electrode surface area and the active material on the electrodes. In this article, we fabricate the three-dimensional microelectrodes with SU-8 photoresist based on the microelectromechanical system technology to increase the electrode surface area and to carry more active materials on the electrodes. The three-dimensional microelectrode was directly prepared by the method of anodic electrodeposition. Its surface and composition were characterized by scanning electron microscopy and energy dispersive spectroscopy. Moreover, cyclic voltammetry and galvanostatic charge-discharge current are also used to test the electrochemical characteristics of the manganese oxide electrodes. When the discharge density is 0.5 mA cm 22 , the areal capacitance for the fabricated three-dimensional microelectrodes with microstructure and the two-dimensional planar microelectrodes without microstructure is 3.68 mF cm 22 and 1.0 mF cm 22 , respectively. The experimental results show that the three-dimensional microelectrode structure prepared with microelectromechanical system technology can effectively increase the electrode surface area and carry more electroactive materials, thereby enhancing the charge storage capacity of the electrodes.

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“…These materials could be more appropriate for miniature devices, where material costs are of less concern. Recently, several mini or micro-ultracapacitors have been proposed to power micro-electromechanical devices [16][17][18][19] or store the energy of solar chips [20,21]. Their material loadings are small in quantity, giving good reasons for employing one-dimensional materials and precious-metal oxide.…”

Section: Introductionmentioning

confidence: 99%

Miniature asymmetric ultracapacitor of patterned carbon nanotubes and hydrous ruthenium dioxide

et al. 2012

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A symmetric ultracapacitor CNT_CNT and an asymmetric ultracapacitor CNT_hRuO(2) of mini size have been prepared with patterned carbon nanotubes (CNT) and hydrous ruthenium dioxide. Galvanostatic charge/discharge results indicate that CNT_hRuO(2) is the superior one in both power and energy densities. In a potential window 2.0 V, the CNT_hRuO(2) cell displays an energy density of 24.0 W h kg(-1) at a power density of 22.9 kW kg(-1). Its power density can be raised to 41.1 kW kg(-1) at the expense of the energy density, which drops to 6.8 W h kg(-1). On the other hand, CNT_CNT performs at a lower level, delivering 5.2 W h kg(-1) at 5.5 kW kg(-1). The favorable charge/discharge performance of CNT_hRuO(2) is attributed to hydrous RuO(2), whose pseudocapacitance drives the other electrode of the vertical CNT array to work harder and makes more use of its double-layer capacitance. The analysis of individual electrode capacitance indicates that the high capacitance of hRuO(2) also causes a disproportion in voltage partition, which restricts the low limit of cycling current in an extended potential window. On energy cycling, CNT_hRuO(2) demonstrates sufficient stability in 10,000 cycles, after an initial 13% drop in capacitance.

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Design, fabrication, and evaluation of on-chip micro-supercapacitors

Cited by 7 publications

References 12 publications

Status review on the MEMS-based flexible supercapacitors

Status review on the MEMS-based flexible supercapacitors

Preparation and characterization of manganese oxide microelectrodes for microelectromechanical system supercapacitor

Miniature asymmetric ultracapacitor of patterned carbon nanotubes and hydrous ruthenium dioxide

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