Design, fabrication, and evaluation of an internally cooled silicon carbide mirror

Khounsary, Ali M.; Fernández, Paloma; Assoufid, Lahsen; Mills, Dennis M.; Walters, Dean; Schwartz, J.; Robichaud, Joseph L.

doi:10.1063/1.1436550

Cited by 14 publications

(7 citation statements)

References 6 publications

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“…Other attractive properties of this material include excellent mechanical properties, such as high elastic modulus and toughness, high chemical inertness and radiation resistance. Reaction-bonded SiC, a material with a thermal conductivity that is two times lower than that of CVD SiC, was successfully used recently to produce an internally cooled mirror (Khounsary et al, 2002). The requirements to the surface quality for a high-performance ML is much higher than for an X-ray mirror and, to the best of our knowledge, there are no prior reports about using SiC substrates for ML optics.…”

Section: Optics At the Chess Wiggler Beamlinesmentioning

confidence: 99%

Multilayer X-ray optics at CHESS

et al. 2006

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Almost half of the X-ray beamlines at the Cornell High Energy Synchrotron Source (CHESS) are based on multilayer optics. ;Traditional' multilayers with an energy resolution of DeltaE/E approximately 2% are routinely used to deliver X-ray flux enhanced by a factor of 10(2) in comparison with standard Si(111) optics. Sagittal-focusing multilayers with fixed radius provide an additional factor of 10 gain in flux density. High-resolution multilayer optics with DeltaE/E approximately 0.2% are now routinely used by MacCHESS crystallographers. New wide-bandpass multilayers with DeltaE/E = 5% and 10% have been designed and tested for potential applications in macromolecular crystallography. Small d-spacing multilayers with d < or = 20 A have been successfully used to extend the energy range of multilayer optics. Analysis of the main characteristics of the Mo/B4C and W/B4C small d-spacing multilayer optics shows enhancement in their performance at higher energies. Chemical vapour deposited SiC, with a bulk thermal conductivity of a factor of two higher than that of silicon, has been successfully introduced as a substrate material for multilayer optics. Characteristics of different types of multilayer optics at CHESS beamlines and their applications in a variety of scattering, diffraction and imaging techniques are discussed.

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Section: Optics At the Chess Wiggler Beamlinesmentioning

confidence: 99%

Multilayer X-ray optics at CHESS

et al. 2006

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“…The optical materials are also divided into different components based on their application 16, 20 Table 2 depicts the various optical materials used for specific applications.…”

Section: Various Optical Components and Their Characteristicsmentioning

confidence: 99%

Plasma polishing processes applied on optical materials: A review

Yadav

Kumar

et al. 2021

Journal of Micromanufacturing

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Nowadays, the surface quality of the material is crucial for industry and science. With the development of micro-electronics and optics, the demand for surface quality has become more and more rigorous, making optical surface polishing more and more critical. Plasma polishing technology is conceived as an essential tool for removing surface and subsurface damages from traditional polishing processes. The plasma processing technology is based on plasma chemical reactions and removes atomic-level materials. Plasma polishing can easily nano-finish hard-brittle materials such as ceramics, glass, crystal, fused silica, quartz, Safire, etc. The optical substrate with micro-level and nano-level surface roughness precision is in demand with the advancement in optics fabrication. The mechanical properties of super-finished optics materials are being used to fulfill the requirement of modern optics. This article discusses the processing of different types of freeform, complex and aspheric optical materials by the plasma polishing process used mainly by the optical industry. The plasma polishing devices developed in the last decade are thoroughly reviewed for their working principles, characteristics and applications. This article also examines the impact of various process parameters such as discharge power, rate of gas flow, mixed gas flow ratio and pressure on the plasma polishing process.

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“…Zerodur, fused silica and metal mirror made of aluminium, copper with electroless Ni-coating can be used where beam exposure is not much intensive. 12, 13 Recently, beryllium (Be) is gaining interest for the space optics for its light weight and high strength. Chemical vapor deposited (CVD) silicon carbide mirrors are widely used for astronomical applications.…”

Section: Introductionmentioning

confidence: 99%

“…Chemical vapor deposited (CVD) silicon carbide mirrors are widely used for astronomical applications. 12 Optical materials for manufacturing optical components and its application are given in Table 1.…”

Section: Introductionmentioning

confidence: 99%

Review of several precision finishing processes for optics manufacturing

Ghosh

Sidpara

Bandyopadhyay

2018

Journal of Micromanufacturing

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The ultrasmooth optical components with atomic-order surface roughness and nanometre-level shape accuracy are in immense demand with the rapid advancement of modern optical technology. In recent years, aspherical and free-form surfaces are gaining more interest for its favorable properties. Moreover, the new optical materials with immensely enhanced mechanical properties are being developed to meet the stringent requirements of modern optics. Fabrication of complex-shaped ultrasmooth optical components becomes a significant challenge as conventional finishing techniques are unable to machine aspherical or free-form surfaces precisely. This situation demands some highly deterministic finishing processes. Mostly, the optical components are fabricated by shaping or pre-finishing methods followed by final finishing processes. In the shaping or pre-finishing methods, the rigid abrasive tools are used to remove the material at an enhanced rate and near net shape of the elements can be attained. Surface finish and shape accuracy can also be improved to some extent. Owing to the presence of residual finishing marks generated by shaping methods, the application of the components is limited to the infrared (IR) optics. Final finishing processes include more deterministic and flexible polishing techniques that can achieve desired surface finish, figure accuracy and surface integrity to make it suitable for shorter wavelength applications. In recent years, single point diamond turning, precision grinding, plasma chemical vaporization machining and magnetorheological fluid-based finishing are widely used for fabricating ultrasmooth optics. In this article, principle, mechanism of material removal and applicability of the aforementioned precision finishing processes to different materials are discussed.

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Design, fabrication, and evaluation of an internally cooled silicon carbide mirror

Cited by 14 publications

References 6 publications

Multilayer X-ray optics at CHESS

Multilayer X-ray optics at CHESS

Plasma polishing processes applied on optical materials: A review

Review of several precision finishing processes for optics manufacturing

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