Design, Fabrication and Characterization of a Tactile Display Based on AlN Transducers

Bernard, François; Gorisse, M.; Casset, F.; Chappaz, C.; Basrour, Skandar

doi:10.1016/j.proeng.2014.11.688

Cited by 5 publications

(2 citation statements)

References 7 publications

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“…Similarly to the More than Moore trend, one can think of developing new devices on glass with optical or mechanical coupling in order to multiply applications. For instance, it has recently been suggested that haptic functions can be added on mobile phone screens through piezoelectric ceramics [ 5 ]. It would be ideal to achieve completely transparent stacks on glass so as not to perturb light transmission when it comes to adding new functionalities to screens.…”

Section: Introductionmentioning

confidence: 99%

Transparent Ferroelectric Capacitors on Glass

Sette¹,

Girod²,

Leturcq³

et al. 2017

Micromachines

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We deposited transparent ferroelectric lead zirconate titanate thin films on fused silica and contacted them via Al-doped zinc oxide (AZO) transparent electrodes with an interdigitated electrode (IDE) design. These layers, together with a TiO2 buffer layer on the fused silica substrate, are highly transparent (>60% in the visible optical range). Fully crystallized Pb(Zr0.52Ti0.48)O3 (PZT) films are dielectrically functional and exhibit a typical ferroelectric polarization loop with a remanent polarization of 15 μC/cm2. The permittivity value of 650, obtained with IDE AZO electrodes is equivalent to the one measured with Pt electrodes patterned with the same design, which proves the high quality of the developed transparent structures.

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Section: Introductionmentioning

confidence: 99%

Transparent Ferroelectric Capacitors on Glass

Sette¹,

Girod²,

Leturcq³

et al. 2017

Micromachines

View full text Add to dashboard Cite

show abstract

“…We developed Finite Element Method (FEM) models and proved the concept using thin-film PZT actuators deposited on silicon substrate [9][10] . Nevertheless, to address transparency, low temperature process was used, to deposit AlN actuators directly on transparent glass substrate [11] .…”

Section: Introductionmentioning

confidence: 99%