Design Considerations for BEOL MIM Capacitor Modeling in RF CMOS Processes

Parthasarathy, Shyam; Swaminathan, Balaji; Sundaram, A.; Groves, R.

doi:10.1109/vlsi.design.2010.63

Cited by 1 publication

(2 citation statements)

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“…Note that a larger overlapping area corresponds to a smaller f 0 due to the higher capacitance. The extracted quality factors Q C of three capacitors at low frequency are approximately 18-20, which are values comparable with those of general metal-insulator-metal (MIM) capacitors 22 ; these quality factors can be further increased by decreasing the electrode gap d. As the frequency increases, the quality factors of three capacitors reduce gradually and then reach zero at approximately 1.4 GHz. Because the building material (VisiJet EX 200) 17 serves as the dielectric material for the capacitors, its dielectric constant (ε r ) determines the performance of the capacitors; however, there are no prior reported data on the dielectric constant of VisiJet EX 200.…”

Section: Capacitorsmentioning

confidence: 62%

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3D-printed microelectronics for integrated circuitry and passive wireless sensors

et al. 2015

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Three-dimensional (3D) additive manufacturing techniques have been utilized to make 3D electrical components, such as resistors, capacitors, and inductors, as well as circuits and passive wireless sensors. Using the fused deposition modeling technology and a multiple-nozzle system with a printing resolution of 30 μm, 3D structures with both supporting and sacrificial structures are constructed. After removing the sacrificial materials, suspensions with silver particles are injected subsequently solidified to form metallic elements/interconnects. The prototype results show good characteristics of fabricated 3D microelectronics components, including an inductor-capacitor-resonant tank circuitry with a resonance frequency at 0.53 GHz. A 3D "smart cap" with an embedded inductor-capacitor tank as the wireless passive sensor was demonstrated to monitor the quality of liquid food (e.g., milk and juice) wirelessly. The result shows a 4.3% resonance frequency shift from milk stored in the room temperature environment for 36 h. This work establishes an innovative approach to construct arbitrary 3D systems with embedded electrical structures as integrated circuitry for various applications, including the demonstrated passive wireless sensors.

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Section: Capacitorsmentioning

confidence: 62%

“…The measured S-parameters of the capacitors are converted to Y-parameters, and then the capacitor performances are extracted as 22 :…”

Section: Capacitorsmentioning

confidence: 99%