Design, Characterization, and Analysis of PZT Micromachined Piezoelectric Ultrasonic Transducers With Good Coupling to Solids

Xing, Zhanqiang; Ji, Weiliang; Sun, Xiangyu; Chen, Yu; Du, Yu; Li, Xiaoshi; Liu, Lifang

doi:10.1109/tuffc.2020.2995424

Cited by 14 publications

(10 citation statements)

References 30 publications

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“…The same year, Xing et al designed pMUT with good coupling to solids and used thick-film pMUT for ultrasound solid-state sensing and actuation unlike the other thin-film design for the same application with improved results and better resolution capabilities in solid sensing [77]. pMUT for fingerprint imaging is described by Y. Lu et al in 2015 [78].…”

Section: System Developmentmentioning

confidence: 99%

Review of pMUTs for medical imaging: towards high frequency arrays

Shivalingaprasad¹,

Arora²,

Krishnan³

2023

Biomed. Phys. Eng. Express

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pMUT (piezoelectric Micromachined Ultrasound Transducer) devices are an alternative that can overcome the limitations associated with conventional ultrasound transducers. pMUT’s are reported for many applications such as range-finding, biometrics, and ultrasound imaging. However, pulse-echo measurements from fabricated pMUT devices/arrays are not commonly reported in literature, a reason being lack of desirable performance either in transmit or receive mode of operation. There is also limited information about the design, fabrication and characterization of 2D-pMUT-arrays operating at high frequencies (>15 MHz) in water medium. In this paper we review ‘state-of-the-art’ for pMUT-array based medical ultrasound imaging, with a focus on their pulse-echo imaging capability. Over the next 3-5 years, we expect further improvement in piezoelectric thin film deposition techniques, on-chip integration of pre-amplification circuits and further miniaturization of pMUT devices, thus paving the way for development of pMUT-array based high frequency medical imaging systems.

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Section: System Developmentmentioning

confidence: 99%

Review of pMUTs for medical imaging: towards high frequency arrays

Shivalingaprasad¹,

Arora²,

Krishnan³

2023

Biomed. Phys. Eng. Express

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“…Almost no studies were reported on ultrasonic-solid-pMUT coupling for ultrasonic signal detection of GIS breakdown discharge, and the fnite element simulation model for ultrasonic-solid-pMUT coupling has not been established yet. In fact, the solid thickness measurement experiments by Xing et al [16] showed that pMUT using piezoelectric ceramics (PZT) membranes was a promising ultrasonic-solidstate sensing and detection equipment. In addition, for the numerical simulation of pMUT, the errors caused by the model simplifcation and boundary settings of electrode have also not been systematically studied in the existing literatures.…”

Section: Introductionmentioning

confidence: 99%

Numerical Study of Acoustic‐Electric Signal Conversion for GIS Discharge Detection and Structure Optimization for pMUT

Zhao

et al. 2023

Mathematical Problems in Engineering

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With the development of microelectromechanical technology, the piezoelectric micromechanical ultrasonic transducer (pMUT) for ultrasonic detection of gas-insulated switchgear (GIS) breakdown discharge has become possible. In this article, the ultrasonic-solid-pMUT coupling simulation model was established to investigate the propagation process of ultrasonic waves in GIS enclosure and the conversion between ultrasonic and electric signals through pMUT. The output electric signals for the unsimplified top electrode and simplified top electrode model were compared, and the structure of receiving pMUT was optimized according to the main ultrasonic frequency range of GIS breakdown discharge and the key performance parameters of pMUT. First, it is found that the simulation results of the ultrasonic-solid-pMUT coupling model are reliable, and the frequency of the output electric signal of receiving pMUT is consistent with the input signal, while the amplitude of output signal attenuates greatly. Second, simplifying the top electrode of pMUT may lead to relatively large errors in simulation results. The output response of simplified pMUT is obviously weakened, and the inherent frequency is higher. Furthermore, it is noted that the pMUT inherent frequency (f0) is inversely proportional to the radius (R) of the piezoelectric layer and directly proportional to the substrate thickness (dsi). When the coverage rate of the top electrode is between 30% and 80%, the pMUT effective electromechanical coupling coefficient ( K e f f 2 ) is high and has a maximum value. Finally, it is indicated that the pMUT with the optimum structure is suitable for the detection of GIS breakdown discharge ultrasonic signals, and the K e f f 2 can be improved by 106.7%.

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“…The MUT is a new type of supersonic transducer using a microelectromechanical system (MEMS) of microelectronics and micromechanical structures [7] capable of operating in extreme conditions. Among modern MUTs, piezoelectric micromachined ultrasonic transducers (PMUTs) have attracted growing attention due to their compact size, light weight, low power consumption and high sensitivity [8] . The thin film structure layer of the PMUT, with its manufacturing processes of material preparation, thin film deposition, and heat treatment, is the key component for ultrasonic wave monitoring [7,9] .…”

Section: Introductionmentioning

confidence: 99%

“…The thin film structure layer of the PMUT, with its manufacturing processes of material preparation, thin film deposition, and heat treatment, is the key component for ultrasonic wave monitoring [7,9] . Therefore, it is worthwhile to explore different materials with distinct properties in order to optimize ultrasonic sensing capability [8] .…”

Section: Introductionmentioning

confidence: 99%

“…Among these, lead zirconate titanate (PZT) is an especially important sensing film material, with a wide range of applications in MEMS system devices [13][14][15] . PZT film is usually deposited by printing [16] or sputtering [8], and after careful grinding the thickness of the film can reach 5-50 μm [17] . Differences in thickness may affect the orientation of the internal crystals and the surface structure, which is crucial to ultrasonic sensor performance [18] .…”

Section: Introductionmentioning

confidence: 99%

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Fabrication and Characterizations of PbZr_xTi_1-xO₃ (PZT) Ultrasonic Sensing Chips

et al. 2022

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PbZrxTi1-xO3 (PZT) ultrasonic sensing chips were fabricated by ball milling, electrical discharge and spraying on iron sheets. Various PZT growth conditions, including the thickness of the iron sheet and the coating layers, were investigated. Ultrasonic sensing measurements indicated that PZT chips of sufficient thickness and with 6 or 9 coating layers exhibited ultrasonic sensing capability. Further, multiple material and electrical characterizations revealed that while sufficient thickness and low leakage were required, uniform growth of the film and a grain size of approximately 150 nm were preferable for ultrasonic sensing. Their compact size, rapid response, and low cost make PZT-based ultrasonic sensors promising for future ultrasonic detection application.

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Design, Characterization, and Analysis of PZT Micromachined Piezoelectric Ultrasonic Transducers With Good Coupling to Solids

Cited by 14 publications

References 30 publications

Review of pMUTs for medical imaging: towards high frequency arrays

Review of pMUTs for medical imaging: towards high frequency arrays

Numerical Study of Acoustic‐Electric Signal Conversion for GIS Discharge Detection and Structure Optimization for pMUT

Fabrication and Characterizations of PbZr_xTi_1-xO₃ (PZT) Ultrasonic Sensing Chips

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Design, Characterization, and Analysis of PZT Micromachined Piezoelectric Ultrasonic Transducers With Good Coupling to Solids

Cited by 14 publications

References 30 publications

Review of pMUTs for medical imaging: towards high frequency arrays

Review of pMUTs for medical imaging: towards high frequency arrays

Numerical Study of Acoustic‐Electric Signal Conversion for GIS Discharge Detection and Structure Optimization for pMUT

Fabrication and Characterizations of PbZrxTi1-xO3 (PZT) Ultrasonic Sensing Chips

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Product

Resources

About

Fabrication and Characterizations of PbZr_xTi_1-xO₃ (PZT) Ultrasonic Sensing Chips