1997
DOI: 10.1016/s0169-4332(96)00752-0
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Design and technological peculiarities of making vacuum integrated circuit of a thermocathode-based AC amplifier

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Cited by 7 publications
(3 citation statements)
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“…Further these questions will be investigated more detailed. At the next stage, nanoporous anodic alumina films [9,10] were investigated (Fig. 10).…”
Section: Investigation Of Thermal Expansionmentioning
confidence: 99%
“…Further these questions will be investigated more detailed. At the next stage, nanoporous anodic alumina films [9,10] were investigated (Fig. 10).…”
Section: Investigation Of Thermal Expansionmentioning
confidence: 99%
“…In this case the peculiarity of formation of thick layers of AA (over tens of micrometers) is the creation of regular nanoporous structures. The presence of nanoporous while using 3D substrates in vacuum integrated circuit (VIC) based on thermoemitters is a significant disadvantage [4]. Purposeful technological processing significantly reduces its negative effect on output characteristics of VIC.…”
Section: Technological Basis Of Constructionmentioning
confidence: 99%
“…Keywords: Anodic aluminum oxide; Annealing aluminum; Galvanostatic and Potentiostatic modes; Ordered oxide samples Anodic aluminum oxide (AAO) has been used for various applications in the fields of optoelectronics, energy storage, separation, sensing, etc. [1][2][3][4][5][6][7][8][9][10][11]. AAO is widely used as a template for producing nanotubes, nanowires, nanorods and nanoparticles [12][13][14].…”
Section: Introductionmentioning
confidence: 99%