Design and simulation of PZT based MEMS piezoelectric accelerometer

Naduvinamani, Sujata; Iyer, Nalini C.

doi:10.1109/iceeot.2016.7755403

Cited by 8 publications

(3 citation statements)

References 1 publication

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“…Piezoelectric ceramics are often lead-containing compounds with a perovskite structure [59]. One of the most extensively used and researched piezoelectric ceramic materials is lead zirconate titanate (PZT) [60][61][62][63][64][65]. Among commercially available piezoelectric materials, PZT is often selected in several applications, because of its high conversion of mechanical energy into electrical energy, being related to its good piezoelectric constant (360 pm/V) [66] and excellent electromechanical coupling coefficient.…”

Section: Piezoelectric Ceramicsmentioning

confidence: 99%

A Review of Piezoelectric Energy Harvesting: Materials, Design, and Readout Circuits

Brusa,

Carrera,

Delprete

2023

Actuators

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Mechanical vibrational energy, which is provided by continuous or discontinuous motion, is an infinite source of energy that may be found anywhere. This source may be utilized to generate electricity to replenish batteries or directly power electrical equipment thanks to energy harvesters. The new gadgets are based on the utilization of piezoelectric materials, which can transform vibrating mechanical energy into useable electrical energy owing to their intrinsic qualities. The purpose of this article is to highlight developments in three independent but closely connected multidisciplinary domains, starting with the piezoelectric materials and related manufacturing technologies related to the structure and specific application; the paper presents the state of the art of materials that possess the piezoelectric property, from classic inorganics such as PZT to lead-free materials, including biodegradable and biocompatible materials. The second domain is the choice of harvester structure, which allows the piezoelectric material to flex or deform while retaining mechanical dependability. Finally, developments in the design of electrical interface circuits for readout and storage of electrical energy given by piezoelectric to improve charge management efficiency are discussed.

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Section: Piezoelectric Ceramicsmentioning

confidence: 99%

A Review of Piezoelectric Energy Harvesting: Materials, Design, and Readout Circuits

Brusa,

Carrera,

Delprete

2023

Actuators

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“…Piezoelectric accelerometers exploit the piezoelectric effect of a quartz crystal; when an accelerative force is applied to it, the crystal produces a voltage that is proportional to the applied force [ 35 , 36 , 37 ].…”

Section: Precordial Vibrations Recording Using Accelerometersmentioning

confidence: 99%

Precordial Vibrations: A Review of Wearable Systems, Signal Processing Techniques, and Main Applications

Santucci

Presti

Massaroni

et al. 2022

Sensors

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Recently, the ever-growing interest in the continuous monitoring of heart function in out-of-laboratory settings for an early diagnosis of cardiovascular diseases has led to the investigation of innovative methods for cardiac monitoring. Among others, wearables recording seismic waves induced on the chest surface by the mechanical activity of the heart are becoming popular. For what concerns wearable-based methods, cardiac vibrations can be recorded from the thorax in the form of acceleration, angular velocity, and/or displacement by means of accelerometers, gyroscopes, and fiber optic sensors, respectively. The present paper reviews the currently available wearables for measuring precordial vibrations. The focus is on sensor technology and signal processing techniques for the extraction of the parameters of interest. Lastly, the explored application scenarios and experimental protocols with the relative influencing factors are discussed for each technique. The goal is to delve into these three fundamental aspects (i.e., wearable system, signal processing, and application scenario), which are mutually interrelated, to give a holistic view of the whole process, beyond the sensor aspect alone. The reader can gain a more complete picture of this context without disregarding any of these 3 aspects.

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“…The research results are expected to be beneficial for chatter detection and intelligent manufacturing.Micromachines 2020, 11, 42 2 of 11 highly reliable, and low-cost sensors are in high demand in the era of the internet of things (IoT). The commonly used accelerometer transducer mechanisms include capacitive [8], piezoresistive [9], and piezoelectric [10,11] mechanisms, all of which produce an output voltage or charge proportional to the measured acceleration. While capacitive and piezoresistive transducers suffer from a relatively weak mechanical-electrical conversion efficiency and a higher power consumption, respectively, piezoelectric transducers surpass the other two mechanisms with a higher transducer efficiency and no standby power.…”

mentioning

confidence: 99%

Design Optimization of a Compact Double-Ended-Tuning-Fork-Based Resonant Accelerometer for Smart Spindle Applications

Chen

Xiao

et al. 2019

Micromachines

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With the rapid developments of the Industrial Era 4.0, numerous sensors have been employed to facilitate and monitor the quality of machining processes. Among them, accelerometers play an important role in chatter detection and suppression for reducing the tool down-time and increasing manufacturing efficiency. To date, most commonly seen accelerometers have relatively large sizes such that they can be installed only on the housing of spindles or the surfaces of workpieces that may not be able to directly capture actual vibration signals or obstruct the cutting process. To address this challenge, this research proposed a compact, wide-bandwidth resonant accelerometer that could be embedded inside high-speed spindles for real-time chatter monitoring and prediction.Composed of a double-ended tuning fork (DETF), a proof mass, and a support beam, the resonant accelerometer utilizes the resonance frequency shift of the DETF due to the bending motions of the structure during out-of-plane accelerations as the sensing mechanism. The entire structure based on commercially available quartz tuning forks (QTFs) with electrodes for symmetric-mode excitations. The advantages of this structure include low noise and wide operation bandwidth thanks to the frequency modulation scheme. A theoretical model and finite element analysis were conducted for designs and optimizations. Simulated results demonstrated that the proposed accelerometer has a size of 9.76 mm × 4.8 mm × 5.5 mm, a simulated sensitivity of 0.94 Hz/g, and a simulated working bandwidth of 3.5 kHz. The research results are expected to be beneficial for chatter detection and intelligent manufacturing.Micromachines 2020, 11, 42 2 of 11 highly reliable, and low-cost sensors are in high demand in the era of the internet of things (IoT). The commonly used accelerometer transducer mechanisms include capacitive [8], piezoresistive [9], and piezoelectric [10,11] mechanisms, all of which produce an output voltage or charge proportional to the measured acceleration. While capacitive and piezoresistive transducers suffer from a relatively weak mechanical-electrical conversion efficiency and a higher power consumption, respectively, piezoelectric transducers surpass the other two mechanisms with a higher transducer efficiency and no standby power. For a typical piezoelectric accelerometer, acceleration will cause the proof mass to exert a force on the beam or film, creating a charge due to piezoelectric effect. However, most resonant type accelerometers have relatively large sizes and are usually installed on the housing of spindles or the stage of workpiece holders.The goal of this research is to design a compact, resonant-type accelerometer for chatter detections. In general, the rotation speed of high-speed spindles can be as high as 30,000 rpm (i.e., 500 Hz), and chatter frequencies usually occur near the operation frequencies with several harmonics. For chatter detections, the working bandwidth of a measuring accelerometer should be 7 times the operation frequency, which is ...

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Design and simulation of PZT based MEMS piezoelectric accelerometer

Cited by 8 publications

References 1 publication

A Review of Piezoelectric Energy Harvesting: Materials, Design, and Readout Circuits

A Review of Piezoelectric Energy Harvesting: Materials, Design, and Readout Circuits

Precordial Vibrations: A Review of Wearable Systems, Signal Processing Techniques, and Main Applications

Design Optimization of a Compact Double-Ended-Tuning-Fork-Based Resonant Accelerometer for Smart Spindle Applications

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