Design and simulation of polymer piezo-electric MEMS microphone

Muralidhar, Y. C.; Neethu, K N; Nagaraja, Veda Sandeep; Pinjare, S. L.

doi:10.1109/ccube.2013.6718562

Cited by 5 publications

(3 citation statements)

References 3 publications

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“…In the context of acoustic sensors employing an organic film to cover the gaps between cantilevers, the Young's modulus and thickness of the film are critical factors, as they influence the resonance frequency and sensitivity of the sensor. This study utilizes COMSOL Multiphysics 6.0 to simulate the effects of the organic film's Young's modulus and thickness on the resonance frequency, [23][24][25][26][27][28][29][30] as illustrated in Fig. 1.…”

Section: Design Conceptmentioning

confidence: 99%

Dependence of sensitivity loss on organic film thickness and influence of cantilever warpage in a piezoelectric wideband acoustic sensor coated with an organic film

Kuchiji,

Masumoto,

Morishita

et al. 2024

Jpn. J. Appl. Phys.

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A wideband acoustic sensor is reported, comprising a piezoelectric micro electro mechanical systems (MEMS) acoustic transducer with organic film-coated cantilevers. Considering the sensitivity reduction associated with the application of an organic film, it is necessary to optimize the material selection and thickness of the organic film. Therefore, the relationship between the thickness of the polyurethane film and the consequent loss in sensitivity is elucidated. Our findings demonstrate that the polyurethane film thickness should be approximately 0.5 μm (or less) to limit sensitivity loss to 6 dB. Additionally, both simulations and experimental results reveal that the resonant frequency of the system is significantly influenced by the warpage of the cantilever. This study provides essential insights into optimizing the performance of MEMS acoustic transducers with organic film-coated cantilevers.

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Section: Design Conceptmentioning

confidence: 99%

Dependence of sensitivity loss on organic film thickness and influence of cantilever warpage in a piezoelectric wideband acoustic sensor coated with an organic film

Kuchiji,

Masumoto,

Morishita

et al. 2024

Jpn. J. Appl. Phys.

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show abstract

“…Next, to confirm the influence of the resonance frequency by connecting the cantilevers to the elastic film, a simulation of the resonance frequency with the structure shown in Fig. 3 was performed using COMSOL Multiphysics 6.0; [21][22][23][24][25][26][27][28] the material constants used were from the COMSOL built-in material library. The edge of the cantilever was fixed as the boundary condition.…”

Section: Device Designmentioning

confidence: 99%

Piezoelectric MEMS wideband acoustic sensor coated by organic film

Kuchiji¹,

Masumoto²,

Baba³

2023

Jpn. J. Appl. Phys.

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In this study, we developed an acoustic sensor with a structure in which a piezoelectric cantilever array is covered with an organic film. For this, we used AlN and polyurethane as the piezoelectric material and organic film, respectively. The results suggested that the sensitivity in the low-frequency region improved, and the resonance frequency increased. We investigated the resonance frequency based on a simulation and verified that it matched the measured value. Further, we created a broadband acoustic sensor by covering the space between the cantilevers with an organic film.

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“…Many authors and companies have designed MEMS microphones primarily intended for audio-related applications [3][4][5][6][7][8][9][10][11][12][13][14][15][16][17]. One of the limitations in increasing the microphone sensitivity is due to difficulties in controlling the residual stress of the diaphragm used in the MEMS transducer microphone.…”

Section: Introductionmentioning

confidence: 99%

Simulation of Piezoelectric Transducer Microphone Diaphragm Based on Different Materials

Mohd Hafiz Ismail,

Wen Jie Koh,

Bibi Nadia Taib

et al. 2024

IJNeaM

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Piezoelectric microphone which utilizes MEMS technology is a type of transducer that converts an input acoustic signal into an output electrical signal. The characteristics of the microphone diaphragm such as the diaphragm design features and the type of piezoelectric materials used will affect the performance of the microphone in terms of sensitivity. It is hard to control the stress of the diaphragm used in the MEMS transducer microphone. A modification of the diaphragm is done in this project to reduce the residual stress of the piezoelectric transducer. In addition, finite element analysis namely structural, modal and harmonic were carried out using Ansys 15.0 to simulate the mechanical and dynamic behaviour of the microphone diaphragm. Two types of diaphragm structure were designed, namely square and circular, while three types of piezoelectric material which are AlN, PZT and ZnO were used as the diaphragm material. The structural analysis findings of the diaphragm subjected to 1 Pa pressure revealed that the circular diaphragm made of AlN material exhibited the highest stress, reaching 43.05 GPa, surpassing the stresses observed in the other two materials. On the contrary, the square diaphragm composed of PZT material demonstrated the lowest stress, with only 1.55 GPa. In terms of resonance frequency, the circular AlN diaphragm achieved the highest resonant frequency, reaching 449.84 kHz, whereas the square PZT diaphragm exhibited the lowest frequency at 200.25 kHz. In general, the circular diaphragm design consistently yielded higher first resonant frequencies compared to the square design.The results show that the circular diaphragm with AlN piezoelectric materials is the ideal diaphragm in the microphone because of the highest stress generated and the first resonant frequency. The stress is related to the sensitivity of a microphone while the high resonant frequency can lead to the better optimization of signal to noise ratio control.

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Design and simulation of polymer piezo-electric MEMS microphone

Cited by 5 publications

References 3 publications

Dependence of sensitivity loss on organic film thickness and influence of cantilever warpage in a piezoelectric wideband acoustic sensor coated with an organic film

Dependence of sensitivity loss on organic film thickness and influence of cantilever warpage in a piezoelectric wideband acoustic sensor coated with an organic film

Piezoelectric MEMS wideband acoustic sensor coated by organic film

Simulation of Piezoelectric Transducer Microphone Diaphragm Based on Different Materials

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