Design and Simulation of MEMS Based Capacitive Accelerometer

Veena, S.; Rai, Newton; Morey, Amogh Manjunath Rao; Suresh, H. L.; Shaik, Habibuddin

doi:10.1007/978-981-16-2919-8_19

Cited by 4 publications

(1 citation statement)

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“…When the sensor is subjected to acceleration, a force equal to the product of mass and acceleration causes the proof mass to displace in the direction normal to the sensor surface [ 1 ]. According to Newton’s second law of motion, acceleration ( a ) is the function of displacement ( x ) of the proof mass and is given by [ 22 ],

where k and m are the spring constant and mass, respectively. The resistivity of nanocomposite at the sensor legs will change, which in turn changes the resistance.…”

Section: Sensing Mechanismmentioning

confidence: 99%

Graphene/PVDF Nanocomposite-Based Accelerometer for Detection of Low Vibrations

2023

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A flexible piezoresistive sensor was developed as an accelerometer based on Graphene/PVDF nanocomposite to detect low-frequency and low amplitude vibration of industrial machines, which may be caused due to misalignment, looseness of fasteners, or eccentric rotation. The sensor was structured as a cantilever beam with the proof mass at the free end. The vibration caused the proof mass to accelerate up and down, which was converted into an electrical signal. The output was recorded as the change in resistance (response percentage) with respect to the acceleration. It was found that this accelerometer has a capability of detecting acceleration up to 8 gpk-pk in the frequency range of 20 Hz to 80 Hz. The developed accelerometer has the potential to represent an alternative to the existing accelerometers due to its compactness, simplicity, and higher sensitivity for low frequency and low amplitude applications.

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where k and m are the spring constant and mass, respectively. The resistivity of nanocomposite at the sensor legs will change, which in turn changes the resistance.…”

Section: Sensing Mechanismmentioning

confidence: 99%