2021
DOI: 10.3390/mi12121536
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Design and Simulation of Flexible Underwater Acoustic Sensor Based on 3D Buckling Structure

Abstract: The exploration of marine resources has become an essential part of the development of marine strategies of various countries. MEMS vector hydrophone has great application value in the exploration of marine resources. However, existing MEMS vector hydrophones have a narrow frequency bandwidth and are based on rigid substrates, which are not easy to be bent in the array of underwater robots. This paper introduces a new type of flexible buckling crossbeam–cilium flexible MEMS vector hydrophone, arranged on a cur… Show more

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Cited by 7 publications
(5 citation statements)
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“…We conducted directivity pattern tests on X and Y channels of FUVH and its four units. The test frequency was 315 Hz, and the data were normalized by [34]:…”
Section: Directivity Pattern Testmentioning
confidence: 99%
“…We conducted directivity pattern tests on X and Y channels of FUVH and its four units. The test frequency was 315 Hz, and the data were normalized by [34]:…”
Section: Directivity Pattern Testmentioning
confidence: 99%
“…Sensors are capable of altering their electrical signals in response to various external stimuli like ion concentration or external pressure. The sensor shows broad applications in production and life, such as industrial production [1], marine exploration [2], environmental protection [3], medical diagnosis [4], biological engineering [5], space exploration [6], smart homes [7], and so on. Traditional sensors typically employ rigid materials like metals or semiconductors as conducting layers, with a deformation measurement range of approximately 5%.…”
Section: Introductionmentioning
confidence: 99%
“…MEMS/NEMS based plate resonators combine both mechanical and electrical functionalities on micro/nanoscales. Attributable to the surplus advantages like miniaturization, fractional weight, high surface to volume ratio, truncated energy consumption, adequate accuracy and precision, augmented sensitivity, enhanced reliability and acceptable stability of micro/nano plate type resonators [18 -20]; its uses range from civil to military ones [21][22][23].…”
Section: Introductionmentioning
confidence: 99%
“…As a consequence of its key features and advantages micro/nanoplate resonators have a wide range of applications as micro-and nanoscale sensors [22][23][24][25][26], actuators [27,28], switches [29], pumps [30,31], filters [32,33] and microfluidic components [34].…”
Section: Introductionmentioning
confidence: 99%