2024
DOI: 10.1007/s00542-024-05644-9
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Design and simulation of a micro-coiled digitally-controlled variable inductor with a monolithically integrated MEMS switch

A. Sharaf,
Sh. M. Eladl,
A. Nasr
et al.

Abstract: This work introduces the design, analysis, simulation, and a standard MEMS fabrication process for a three-dimensional micro-coil with a magnetic core and a digital switch configuration using a completely integrated, fully MEMS-compatible process to achieve a digitally controlled inductance. The proposed design can also be utilized as a micro-transformer. The proposed design consists of five identical 3D coils and their corresponding MEMS switches. These coils are digitally controlled to achieve a variable ind… Show more

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