Design and simulation of a novel fungus-shaped center embossed diaphragm for fiber optic pressure sensors

Hayber, Şekip Esat; Aydemir, Umut

doi:10.1016/j.yofte.2020.102429

Cited by 5 publications

(1 citation statement)

References 28 publications

(44 reference statements)

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“…According to different structure and principle, existing high temperature pressure sensors are mainly divided into SOI sensors [1,2], SOS sensors [3], SiC sensors [4,5] and fiber optic sensors [6,7]. SOI sensors are difficult to work for a long time in an environment above 500 ℃, due to factors such as high-temperature creep and high-temperature leakage current increase of silicon.…”

Section: Introductionmentioning

confidence: 99%

Design of a multi-physics coupling MEMS pressure sensor

Sun,

Zhang,

Zhao

2024

J. Phys.: Conf. Ser.

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The pressure measurement of explosion shock wave puts forward high requirements on the temperature resistance and response speed of the sensor. In this paper, a multi-physics coupling pressure sensor is designed to meet requirements. The sensor mainly consists of a Fabry-Perot cavity optical fiber sensing unit, a piezoelectric pressure sensing unit and a thermometric resistance temperature measurement module. Firstly, the structure of the sensor is designed. The top and bottom surfaces of the Fabry-Perot cavity are composed of a silicon diaphragm and a quartz glass. The piezoelectric pressure sensing unit is an AlN film including its electrodes. Pt thermometric resistance is developed to realize real-time temperature monitoring. Secondly, the fabrication process of the sensor is discussed, especially three key technologies. An Al film is sputtered to increase the reflectivity of the quartz glass. The SU-8 photoresist is applied to accurately control the thickness of Fabry-Perot cavity. Etching is adopted to work out the graphics of the AlN piezoelectric film. At last, a complete fabrication process of the sensor is described. The fabrication of multilayer films begins with a double-sided polishing silicon wafer, while Fabry-Perot cavity was from a double-sided polishing quartz glass. Then two parts of the sensor are combined to ensure the multi-physics coupling sensor to achieve complete function.

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