Design and simulation of a multi-function MEMS sensor for health and usage monitoring

Abstract

-Health and usage monitoring as a technique for online test, diagnosis or prognosis of structures and systems has evolved as a key technology for future critical systems. The technology, often refereed to as HUMS is usually based around sensors that must be more reliable than the system or structure they are monitoring. This paper proposes a fault tolerant sensor architecture and demonstrates the feasibility of realising this architecture through the design of a dual mode humidity/pressure MEMS sensor with an integrated temperature function. The sensor has a simple structure, good linearity and sensitivity, and the potential for implementation of built-inself-test features. We also propose a re-configurable sensor network based on the multi-functional sensor concept that supports both Normal Operational and Fail Safe Modes. The architecture has the potential to significantly increase system reliability and supports a reduction in the number of sensors required in future HUMS devices. The technique has potential in a wide range of applications, especially within wireless sensor networks.

Development of a Microelectromechanical System (MEMS)-Based Multisensor Platform for Environmental Monitoring

“…The experimentally measured diffusion coefficient of 0.9 × 10 Figure 7. This variation has already been reported for moisture desorption in polyimides that suffered the use of SF 6 during O 2 plasma etching [17], as is the case for our dielectric layer during the silicon underetching step [10]. The measured diffusion coefficient is significantly greater than the measured absorption coefficient.…”

“…The fabrication of multiple MEMS sensors on a single substrate could also result in the implementation of sensor redundancy, thereby enabling higher levels of integration and reliability. In the context of Health and Usage Monitoring Microsystems (HUMMs) in particular, MEMS sensors present numerous advantages [6]. For all these reasons, MEMS-based sensor technology is a fast growing area with a promising future in a wide range of applications [7], as it presents many advantages such as the ability to correct cross-sensitivities and the possibility of deployment of the resulting chip in a larger modular system where sensed data can either be logged or immediately read.…”

“…When compared to the majority of other current modules, this solution offers greater simplicity of operation, lower costs of production and utilization as well as data collection from a greater number of sensors: existing solutions generally consist of fewer sensing capabilities [6] or are comprised of a number of larger discrete sensors [9].…”

A Review of Smart House Analysis Methods for Assisting Older People Living Alone

“…Other Smart Houses also use Health and Usage Monitoring Systems (HUMS). HUMS refers to "sensors that monitor use and condition of a utility, and sub-systems that contain sensors, processors and algorithms" [49].…”

Design and characterization of an integrated multifunction micro sensor

“…A few integrated sensors with multifunction to lessen costs and save space have been proposed (Mohammadi Abdolreza et al 2011;Xu et al 2010;Sun and Shida 2000;Fujita and Maenaka 2002). These sensors have been used in many fields from chemical analysis to industry analysis and inspection.…”