Design and simulation of a low voltage wide band RF MEMS switch

Mafinejad, Yasser; Kouzani, Abbas Z.; Mafinezhad, Khalil; Nabovatti, H.

doi:10.1109/icsmc.2009.5346759

Cited by 8 publications

(3 citation statements)

References 10 publications

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“…The parameters and values of the MEMS switch are given in Table I by using Eq. (11) and details in references [34,35]. Fringing constant (K) 1.4 Figure 4 shows the simulation result of MEMS shunt switch according to the physical structure of MEMS switch with electromagnetic 3 dimension simulator (EM3DS).…”

Section: Design and Simulation Of Rf Mems Switch For 4-24 Ghzmentioning

confidence: 99%

Design and Simulation of a Low-Actuation-Voltage MEMS Switch

Mafinejad¹,

Kouzani²,

Matekovits³

2015

Proceedings of the 10th EAI International Conference on Body Area Networks

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This paper presents a low-actuation-voltage micro-electromechanical system (MEMS) capacitive shunt switch which has a very large bandwidth (4 GHz to 24 GHz). In this work, the isolation of MEMS switch is improved by adding two short high impedance transmission lines at the beginning and end of a coplanar waveguide (CPW). Simulating the switch demonstrates that a return loss (S11) is less than-26 dB for the entire frequency band, and perfect matching at 20 GHz in upstate position. A ramp dual pulse driver is also designed for reducing the capacitive charge injection for considering the reliability of the switch. The simulation results show that the shifting of voltage due to the capacitive charge is reduced by more than 35% of the initial value. Finally, the dynamic behavior of the MEMS switch is simulated by modal analysis and using CoventorWare to calculate the natural frequencies of the switch and its mode shapes. The switching ON and OFF time are 4.48 and 2.43 µs, respectively, with an actuation voltage of less than 15 V.

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Section: Design and Simulation Of Rf Mems Switch For 4-24 Ghzmentioning

confidence: 99%

Design and Simulation of a Low-Actuation-Voltage MEMS Switch

Mafinejad¹,

Kouzani²,

Matekovits³

2015

Proceedings of the 10th EAI International Conference on Body Area Networks

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“…The issue of the electrostatic MEMS switches is their high actuation voltage owing to a large capacitance ratio. These types of problems can be conquered by MEMS switches.In this technocratic era, the main motive is to develop the high performance MEMS switches which mainly focus on power transmission, low actuation voltage, wide band operational frequency, short switching time, good packaging, and high reliability [2]. In this paper we represent the design and simulate Fixed-Fixed switch with different shapes of perforation.…”

Section: Introductionmentioning

confidence: 99%

Comparative Study of Perforated RF MEMS Switch

Saxena

Agrawal

2015

Procedia Computer Science

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MEMS are the Micro Electronic mechanical system or in general terms it is also known as Micro electronic mechanical switch. MEMS have classified in two types of switch that is series switch and shunt switch .The cantilever is a series type switch whereas the fixed-fixed beam is shunt type switch. Fixed-Fixed beam is the element that is fixed at both anchor ends. The electrostatic actuation process occurs on the switch due to which switch deflects from its original position. The stiction problem occurs in MEMS switches which have been reduced by the proposed design. The perforation is used to reduce the squeeze film damping by decreasing the mass of the switch. As the voltage increases the switch moves to downward z-direction .The displacement is produced in the switch as direction of movement is towards negative z-axis. When the beam contacts with electrode, pull in voltage is achieved. This paper explores the perforation and meander concept with Fixed -fixed switch, which increases the flexibility, low actuation voltage and switching speed. The various types of perforations provide discrete displacement corresponding to voltage. In this paper we represent the design and simulation of Fixed-Fixed switch using perforation of size 2μm-5μm. The electrostatic actuation mechanism is applied on the Fixed-fixed switch which has a serpentine meanders and perforation at different voltages. The switch is designed and simulated by using COMSOL ® MULTIPHYSICS 4.3b software.

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“…Similarly, the support configuration has changed from fixedfixed and fixed-free (cantilever), to circular (clamped on all sides), and to serpentine coils. 19 Likewise, the design of commercially available switches 20 have evolved to either having patterned dielectrics on the bottom electrode (M 2 ) and/or holes in the top electrode (M 1 ) to improve reliability and/or performance of the actuator. 21 With such a broad variance in the electrode geometries and support configurations, analysis of actuation characteristics is often done on a case-by-case basis.…”

Section: Introductionmentioning

confidence: 99%

Universal scaling and intrinsic classification of electro-mechanical actuators

Palit

Jain

Alam

2013

Journal of Applied Physics

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Actuation characteristics of electromechanical (EM) actuators have traditionally been studied for a few specific regular electrode geometries and support (anchor) configurations. The ability to predict actuation characteristics of electrodes of arbitrary geometries and complex support configurations relevant for broad range of applications in switching, displays, and varactors, however, remains an open problem. In this article, we provide four universal scaling relationships for EM actuation characteristics that depend only on the mechanical support configuration and the corresponding electrode geometries, but are independent of the specific geometrical dimensions and material properties of these actuators. These scaling relationships offer an intrinsic classification for actuation behavior of a broad range of EM actuators with vastly different electrode/support geometries. Consequently, the problem of analysis/ design of complex EM actuators is reduced to the problem of determining only five scaling parameters, which can be obtained from no more than three independent characterization experiments or numerical simulations. V

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Design and simulation of a low voltage wide band RF MEMS switch

Cited by 8 publications

References 10 publications

Design and Simulation of a Low-Actuation-Voltage MEMS Switch

Design and Simulation of a Low-Actuation-Voltage MEMS Switch

Comparative Study of Perforated RF MEMS Switch

Universal scaling and intrinsic classification of electro-mechanical actuators

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