Abstract:A low-energy single ion irradiation system is developed in its initiation in Thailand to follow one of the trends in novel ion beam technology exploitation. Single ion irradiation of materials is a highly technological development of ion beam technology. The developed single ion irradiation systems worldwide are primarily in the MeV-energy range and for single cell studies, and recently the trend has been extended to the low-energy range (< 100 keV) but focused on microelectronic applications. Based on our … Show more
Set email alert for when this publication receives citations?
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.