Design and simulation of a novel MEMS-based single proof mass three-axis piezo-capacitive accelerometer

Ghasemi, Salar; Sotoudeh, Behzad; Pazhooh, Mehdi

doi:10.1007/s00542-023-05604-9

Cited by 3 publications

(1 citation statement)

References 35 publications

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“…The stiction is more dominant in the devices operating at high temperature ranges as the hot metal plates get stuck together due to expansion of the surface of the electrodes. The metal-to-metal contact switches are mostly suffered structures from stiction issues due to migration of metal particles upon the cyclic application of MEMS devices [139]. The capacitive MEMS switches use dielectric materials and it has been found that the high-k dielectric materials are subject to charging during application of actuation voltages.…”

Section: Dielectric Charging and Stiction Problemmentioning

confidence: 99%

MEMS Switch Realities: Addressing Challenges and Pioneering Solutions

Kurmendra,

Agarwal

2024

Micromachines

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Micro-Electro-Mechanical System (MEMS) switches have emerged as pivotal components in the realm of miniature electronic devices, promising unprecedented advancements in size, power consumption, and versatility. This literature review paper meticulously examines the key issues and challenges encountered in the development and application of MEMS switches. The comprehensive survey encompasses critical aspects such as material selection, fabrication intricacies, performance metrics including switching time and reliability, and the impact of these switches on diverse technological domains. The review critically analyzes the influence of design parameters, actuation mechanisms, and material properties on the performance of MEMS switches. Additionally, it explores recent advancements, breakthroughs, and innovative solutions proposed by researchers to address these challenges. The synthesis of the existing literature not only elucidates the current state of MEMS switch technology but also paves the way for future research avenues. The findings presented herein serve as a valuable resource for researchers, engineers, and technologists engaged in advancing MEMS switch technology, offering insights into the current landscape and guiding future endeavors in this rapidly evolving field.

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Section: Dielectric Charging and Stiction Problemmentioning

confidence: 99%

MEMS Switch Realities: Addressing Challenges and Pioneering Solutions

Kurmendra,

Agarwal

2024

Micromachines

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Soft Bioelectronics for Heart Monitoring

Mirzajani,

Kraft

2024

ACS Sens.

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Cardiovascular diseases (CVDs) are a predominant global health concern, accounting for over 17.9 million deaths in 2019, representing approximately 32% of all global fatalities. In North America and Europe, over a million adults undergo cardiac surgeries annually. Despite the benefits, such surgeries pose risks and require precise postsurgery monitoring. However, during the postdischarge period, where monitoring infrastructures are limited, continuous monitoring of vital signals is hindered. In this area, the introduction of implantable electronics is altering medical practices by enabling real-time and out-of-hospital monitoring of physiological signals and biological information postsurgery. The multimodal implantable bioelectronic platforms have the capability of continuous heart sensing and stimulation, in both postsurgery and out-of-hospital settings. Furthermore, with the emergence of machine learning algorithms into healthcare devices, next-generation implantables will benefit artificial intelligence (AI) and connectivity with skin-interfaced electronics to provide more precise and user-specific results. This Review outlines recent advancements in implantable bioelectronics and their utilization in cardiovascular health monitoring, highlighting their transformative deployment in sensing and stimulation to the heart toward reaching truly personalized healthcare platforms compatible with the Sustainable Development Goal 3.4 of the WHO 2030 observatory roadmap. This Review also discusses the challenges and future prospects of these devices.

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Finite element analysis for the measurement error of electrostatic accelerometer due to the electrode misalignment

Tang,

Qu,

Liu

et al. 2024

Meas. Sci. Technol.

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The electrostatic accelerometer is the key payload of many space missions, such as satellite gravity measurements, space gravitational experiments, with a typical precision requirement from nano-g to femto-g. The measurement error model analysis is an important issue for the electrostatic accelerometer with numerous error sources. The traditional method by theoretical analysis is complicated to evaluate the complete measurement error models quantitatively especially when the machining and assembly errors of the sensor head are considered. Limited by the earth gravity and seismic noise which is much higher than the intrinsic noise, the complete error model of electrostatic accelerometers can also hardly be tested on ground. In this paper, the method by using finite element analysis of the sensor head is studied. The simulation model for an electrostatic accelerometer sensor head is built, and the multi-conductor capacitance matrix data is simulated. The accuracy of the capacitance simulation is evaluated in three ways including the convergence check of the capacitance with the mesh size, the symmetry verification, and the sensitivity comparison with the theoretical model. Finally, the accelerometer measurement model is analyzed based on the simulation data, using the case of rotating installation misalignment of the upper electrode as an example. The measurement model and error items of one horizontal axis and one rotating axis are quantitatively evaluated. The method proposed in this paper provide a new effective approach to the measurement model analysis of the electrostatic accelerometers in complex working scenarios both in orbit and on ground, which could be helpful to enhance the performance and the efficiency of application.

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Design and simulation of a novel MEMS-based single proof mass three-axis piezo-capacitive accelerometer

Cited by 3 publications

References 35 publications

MEMS Switch Realities: Addressing Challenges and Pioneering Solutions

MEMS Switch Realities: Addressing Challenges and Pioneering Solutions

Soft Bioelectronics for Heart Monitoring

Finite element analysis for the measurement error of electrostatic accelerometer due to the electrode misalignment

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