As a reflector of the high-precision measurement system, the reflecting surface RMS has a significant impact on the accuracy of the entire system. Currently, studies on honeycomb sandwich structures mainly focus on optimization with lightweight as the goal and stiffness and strength as constraints. And studies on temperature deformation are limited. Consulting the honeycomb sandwich equivalent theory, this paper has studied the influence of geometric parameters of honeycomb sandwich structure on the reflecting RMS in different temperature fields. In global temperature fields, the reflecting surface RMS is linked to curvature radius R, temperature changes, and the length a closely. The height mainly causes the translation of the reflecting surface in the Z direction. In temperature gradient fields, the reflecting surface RMS is linked to the height h, temperature gradient, and length a closely. And the curvature radius R has little effect.