2015 Conference on Power, Control, Communication and Computational Technologies for Sustainable Growth (PCCCTSG) 2015
DOI: 10.1109/pccctsg.2015.7503950
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Design and Process control of Siemens polysilicon CVD reactor

A. Swetha Priya1,
Suresh Kumar
2
,
Sibin K. Mathew
3
et al.
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