Design and Performance Testing of Constant-Temperature Water Jacket Small-Scale Model of Lithographic Projection Lens

Hai-feng, 彭海峰 Peng; Xinfeng, 于新峰 Yu; Shuo, 秦硕 Qin

doi:10.3788/lop53.081201

激光与光电子学进展

2016

DOI: 10.3788/lop53.081201

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Design and Performance Testing of Constant-Temperature Water Jacket Small-Scale Model of Lithographic Projection Lens

彭海峰 Peng Hai-feng¹,

于新峰 Yu Xinfeng²,

秦硕 Qin Shuo³

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Design and Performance Testing of Constant-Temperature Water Jacket Small-Scale Model of Lithographic Projection Lens

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