Design and performance test of a two-axis fast steering mirror driven by piezoelectric actuators

Fang, Chu; Guo, Jin; Yang, Guoqing; Jiang, Zhenhua; Xu, Xiping; Wang, Tingfeng

doi:10.1007/s11801-016-6147-6

Cited by 15 publications

(2 citation statements)

References 13 publications

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“…Shao et al proposed a compact precision tilt positioning mechanism for inter‐satellite optical communication, [ 150 ] which used three piezoelectric actuators and the elastic deformation of a flexure ring to achieve tilt motions. Fang et al proposed a 2‐DOF piezo‐actuated fast steering mirror for incoherent laser beam combination, [ 151 ] which achieved the tilting range of 4 mrad with the first resonant frequency of 250 Hz.…”

Section: Multi‐dof Piezoelectric Actuationmentioning

confidence: 99%

Review on Multiple‐Degree‐of‐Freedom Cross‐Scale Piezoelectric Actuation Technology

Chang,

Chen,

Zhang

et al. 2024

Advanced Intelligent Systems

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Piezoelectric actuation technology has been widely used in various precise‐oriented fields. Its notable advantages include high resolution, rapid response speed, output force with high density, and immunity to electromagnetic interference. Characteristics of cross‐scale and multiple‐degree‐of‐freedom (multi‐DOF) output motions are of utmost importance in the context of micro‐/nanopositioning technology. For decades, researchers have been working to develop various piezoelectric devices that exploit these important properties. In this review, a comprehensive review of recent research efforts in the field of cross‐scale multi‐DOF piezoelectric drive technology is provided. To commence, it provides an in‐depth exploration of the unique advantages associated with piezoelectric actuation, demonstrating them through comparative analyses with alternative actuation methods. Subsequently, the complexity of piezoelectric cross‐scale motion is introduced, and the multi‐DOF piezoelectric motion is classified in detail. Furthermore, the practical applications of multi‐DOF cross‐scale piezoelectric actuation technology are systematically elucidated, highlighting its versatility and suitability in real‐world environments. Finally, an in‐depth discussion that addresses the challenges encountered in the field is provided, and the prospective directions for further developments in piezoelectric actuation technology are outlined. This scholarly contribution plays an important role in guiding future research and innovative initiatives.

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Section: Multi‐dof Piezoelectric Actuationmentioning

confidence: 99%

Review on Multiple‐Degree‐of‐Freedom Cross‐Scale Piezoelectric Actuation Technology

Chang,

Chen,

Zhang

et al. 2024

Advanced Intelligent Systems

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“…generally less than 1 . [6][7][8][9][10][11] In order to realize a wider range of travel, the tiptilt stages driven using VCAs have been developed. 1,[12][13][14][15] However, in conventional tip-tilt stages driven using the VCAs, it is necessary that the size of the air gap of the VCA is larger than the transverse displacement of the coil.…”

Section: Introductionmentioning

confidence: 99%

Design and modeling of a compliant tip-tilt-piston micropositioning stage with a large rotation range

Chen

Ding

Zhu

et al. 2018

Proceedings of the Institution of Mechanical Engineers, Part C:

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In compliant tip-tilt-piston micropositioning stages, it is difficult to achieve a large rotation range using small air–gap voice coil actuators. With a smaller air gap, the voice coil actuators can produce a larger output force; however, the coil of the voice coil actuator touches the stator as the stage rotates. This paper presents the mechanical design, modeling and experimental tests of a novel large-angle tip-tilt-piston stage driven using four small air-gap voice coil actuators. In order to prevent the occurrence of undesired contact between the coil and stator, a compliant decoupling mechanism is introduced to minimize the transverse displacement of the coil of the voice coil actuator. An improved substructure method based on the compliance matrix is applied to calculate the rotational stiffness of the stage and transverse displacement of the coil. Lagrange’s equation is used to obtain the dynamic resonant frequencies. Based on this, an optimization procedure is proposed for determining the design parameters of the stage. The finite element analysis is performed to verify the theoretical calculation. Finally, a prototype of the stage is fabricated, and experiments are conducted to validate the feasibility of the stage. The proposed stage can achieve rotational–motion strokes of 83.18 mrad and 82.26 mrad in the working axes, for which the rotational mode frequencies are 55.45 Hz and 56.09 Hz, respectively. The motion resolution of the stage is ±6.67 μrad. The maximum transverse displacement of the coil of the voice coil actuator is 10.98 µm, which is negligible as compared to the air gap (0.38 mm) of the voice coil actuator. In summary, a tip-tilt-piston stage was designed to achieve a large rotation range using small-air-gap voice coil actuators.

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Design and performance test of the fast-steering mirror with flexure hinge used in vehicle track-launch system

Zhang

Chen

2019

Optoelectron. Lett.

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Design and performance test of a two-axis fast steering mirror driven by piezoelectric actuators

Cited by 15 publications

References 13 publications

Review on Multiple‐Degree‐of‐Freedom Cross‐Scale Piezoelectric Actuation Technology

Review on Multiple‐Degree‐of‐Freedom Cross‐Scale Piezoelectric Actuation Technology

Design and modeling of a compliant tip-tilt-piston micropositioning stage with a large rotation range

Design and performance test of the fast-steering mirror with flexure hinge used in vehicle track-launch system

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