Design and performance study of fabry–perot filter based on DBR for a non-dispersive infrared carbon dioxide sensor

Gon, Nam; Lee, Junyeop; Jung, Dong Geon; Kong, Seong Ho; Jung, Daewoong

doi:10.46670/jsst.2021.30.4.250

Cited by 3 publications

(1 citation statement)

References 15 publications

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“…1,2) Therefore, developing cost-effective CO 2 sensors has been attracting great interest because of the demand for real-time CO 2 monitoring [3][4][5] at critical CO 2 emission areas. CO 2 detectors can be mainly classified into metal-oxide, 6,7) acoustic, 8,9) catalytic, 10) and optical [11][12][13] sensors. Optical CO 2 sensors are among the most discussed sensor types because of their high sensitivity, selectivity, and long-term stability.…”

Section: Introductionmentioning

confidence: 99%

Design and fabrication of poly-Si/SiO₂ Fabry–Perot filter for nondispersive IR CO₂ sensors

Lee,

Hwang,

Han

et al. 2024

Jpn. J. Appl. Phys.

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The relationship between the transmittance and FWHM of a Fabry-Perot filter for a nondispersive carbon dioxide (CO2) sensor was investigated as a function of the number of distributed Bragg reflector (DBR) pairs consisting poly-Si and SiO¬2 thin films. Given the significant prior research on the fabrication of high-performance Fabry-Perot filters, this study is focused on the relationship between the transmittance and FWHM that can be achieved by controlling the reflectance of the DBR pairs. Each layer of the filter was simulated adequately as the poly-Si and SiO2-based DBR pairs, and poly-Si and SiO2 were deposited on the soda–lime substrate by radio frequency sputtering and low-pressure chemical vapor deposition based on the simulation results. The fabricated filter showed a transmittance of 43.7% and FWHM of 125 nm at 4.26 µm. The NDIR CO2 sensor with Fabry-Perot filter showed enhanced selectivity to CH4 and CO compared with normalized CO2 response.

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Section: Introductionmentioning

confidence: 99%

Design and fabrication of poly-Si/SiO₂ Fabry–Perot filter for nondispersive IR CO₂ sensors

Lee,

Hwang,

Han

et al. 2024

Jpn. J. Appl. Phys.

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Optical waveguide structure design of Non-dispersive Infrared (NDIR) CO2 gas sensor for high-sensitivity

Yoon¹,

Lee²,

Do³

et al. 2021

KSS

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Sensing characteristics of a non-dispersive infrared CO2 sensor using a Fabry-Perot filter based on distributed Bragg reflector

Gon¹,

Lee²,

Jung³

et al. 2021

KSS

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Design and performance study of fabry–perot filter based on DBR for a non-dispersive infrared carbon dioxide sensor

Cited by 3 publications

References 15 publications

Design and fabrication of poly-Si/SiO₂ Fabry–Perot filter for nondispersive IR CO₂ sensors

Design and fabrication of poly-Si/SiO₂ Fabry–Perot filter for nondispersive IR CO₂ sensors

Optical waveguide structure design of Non-dispersive Infrared (NDIR) CO2 gas sensor for high-sensitivity

Sensing characteristics of a non-dispersive infrared CO2 sensor using a Fabry-Perot filter based on distributed Bragg reflector

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Design and performance study of fabry–perot filter based on DBR for a non-dispersive infrared carbon dioxide sensor

Cited by 3 publications

References 15 publications

Design and fabrication of poly-Si/SiO2 Fabry–Perot filter for nondispersive IR CO2 sensors

Design and fabrication of poly-Si/SiO2 Fabry–Perot filter for nondispersive IR CO2 sensors

Optical waveguide structure design of Non-dispersive Infrared (NDIR) CO2 gas sensor for high-sensitivity

Sensing characteristics of a non-dispersive infrared CO2 sensor using a Fabry-Perot filter based on distributed Bragg reflector

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Product

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Design and fabrication of poly-Si/SiO₂ Fabry–Perot filter for nondispersive IR CO₂ sensors

Design and fabrication of poly-Si/SiO₂ Fabry–Perot filter for nondispersive IR CO₂ sensors