Design and performance of an electrothermal MEMS microengine capable of bi-directional motion

Kolesar, Edward S.; Odom, William E.; Jayachandran, J. Amos Robert; Ruff, Matthew D.; Ko, Simon Y.; Howard, Jeffery T.; Allen, Peter B.; Wilken, Josh M.; Boydston, Noah C.; Bosch, Jorge E.; Wilks, Richard J.; McAllister, Justin

doi:10.1016/j.tsf.2003.07.011

Cited by 12 publications

(3 citation statements)

References 4 publications

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“…As a result, we combine a set of small-stroke, yet high-force, actuators, and a ratcheting system. 10 Two classes of thermal actuators are used in our design. Thermal actuators deflect during thermal expansion induced by Joule heating.…”

Section: The Drive Systemmentioning

confidence: 99%

Small solutions to the large telescope problem: a massively replicated MEMS spectrograph

Konidaris

Kubby

Sheinis

2008

Advanced Optical and Mechanical Technologies in Telescopes and Instrumentation

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In traditional seeing-limited observations the spectrograph aperture scales with telescope aperture, driving sizes and costs to enormous proportions. We propose a new solution to the seeing-limited spectrograph problem. A massively fiber-sliced configuration feeds a set of small diffraction-limited spectrographs. We present a prototype, tunable, J-band, diffraction grating, designed specifically for Astronomical applications: The grating sits at the heart of a spectrograph, no bigger than a few inches on a side. Throughput requirements dictate using tens-ofthousands of spectrographs on a single 10 to 30 meter telescope. A full system would cost significantly less than typical instruments on 10m or 30m telescopes.

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Section: The Drive Systemmentioning

confidence: 99%

Small solutions to the large telescope problem: a massively replicated MEMS spectrograph

Konidaris

Kubby

Sheinis

2008

Advanced Optical and Mechanical Technologies in Telescopes and Instrumentation

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“…The surface micromachining of polysilicon as heating element has been reported lately [17][18][19]. Beside the work we have been performing on this topic for application in the field of PowerMEMS [17], surface micromachined polysilicon igniters exhibiting high power consumption have been integrated in a gas turbine microengine [18].…”

Section: E-mail Address: Danickbriand@uninech (D Briand)mentioning

confidence: 99%

Reliability of freestanding polysilicon microheaters to be used as igniters in solid propellant microthrusters

Briand

Pham

Rooij

2007

Sensors and Actuators A: Physical

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This paper presents the design, fabrication and characterisation of surface micromachined polysilicon microheaters to be used as microigniters for micropropulsion applications. The microigniters are heated up by Joule effect and the thermal losses through the substrate are minimised by suspending the microheaters above the substrate. The developed process was compatible with the integration of the nozzle part of the microthruster. The electrical, thermal and mechanical characteristics of the microheaters were studied with the aim of evaluating their reliability. Temperatures up to 470 • C could be reached with an electrical power of 45 mW/beam. The current-voltage relation followed a linear characteristic at low power; at high bias voltages, a drift of the electrical resistance was measured after a few I-V cycles at power higher than 40 mW/beam. The elastic and plastic deformation threshold of the microheaters in operation and their maximum deflection before rupture were measured. The microheaters could dissipate relatively high constant powers for a few minutes to hours. The fabricated microheaters are promising candidates for the ignition of solid propellant microthrusters.

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“…These systems have prompted the development of several device structures. [1][2][3][4] The challenge with these systems, however, includes a stiction problem, the need for a protection coating, and an expensive hermetic packaging requirement that may account for 75-95% of the cost of the systems. 5 Replacing the hermetic packaging with an appropriate, efficient protective coating would considerably lower the cost of the systems, as well as provide a remedy for the stiction problem.…”

Section: Introductionmentioning

confidence: 99%

Toward a better understanding of synthesis and processing of ceramic/self-assembled monolayer bilayer coatings

Salami

Yang

Chitre

et al. 2005

Journal of Elec Materi

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Ceramic/self-assembled monolayer (SAM) bilayer coatings can provide adequate protection for silicon devices, or act as a multipurpose coating for other electronic applications, due to synergistic effects by forming a hybrid coating structure. The organic SAM layer acts as a "template" for the growth of the ceramic layer, while the ceramic layer can provide protection from environmental and mechanical impact. Low-temperature solution-based deposition techniques, namely, an in-situ solution method (biomimetic) and a hydrothermal method, have been employed in this study. Specifically, phosphonate-based (diethyl phosphatoethyl triethoxy silane) SAMs were used as a template to generate a zirconia ceramic layer at low temperatures. Other organic templates such as -SiCl 3 -, -OH-, -HSO 3 -, or -CH 3 -terminated SAMs were also examined. The reactions to grow the ceramic film were found to be pH sensitive. The ceramic and SAM coatings were characterized by a variety of analytical techniques. A pathway for the formation of the ceramic coating is also discussed.

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Design and performance of an electrothermal MEMS microengine capable of bi-directional motion

Cited by 12 publications

References 4 publications

Small solutions to the large telescope problem: a massively replicated MEMS spectrograph

Small solutions to the large telescope problem: a massively replicated MEMS spectrograph

Reliability of freestanding polysilicon microheaters to be used as igniters in solid propellant microthrusters

Toward a better understanding of synthesis and processing of ceramic/self-assembled monolayer bilayer coatings

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