Design and performance of an advanced metrology building for MIKES

Lassila, Antti; Kari, M.; Koivula, Hannu; Koivula, U.; Kortström, Jari; Leinonen, Eeva; Manninen, Jorma; Manssila, J.; Mansten, T.; Meriläinen, T.; Muttilainen, J.; Nissilä, J.; Nyblom, R.; Riski, K.; Sarilo, J.; Isotalo, Heikki

doi:10.1016/j.measurement.2010.10.013

Cited by 32 publications

(33 citation statements)

References 6 publications

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“…This would make robot performance drift of minimal concern. Whilst laser tracker thermal, vibration or humidity induced drift may be a concern [37], this cannot be confirmed without running experiments that study measurement variations over time alongside these potential contributors, independently of the robotics application. If error fluctuations do reflect robot behaviour, the relationship is non-linear with time and highlights the complexity of calibration.…”

Section: Performance Driftmentioning

confidence: 99%

Positional capability of a hexapod robot for machining applications

Barnfather

Goodfellow

Abram

2016

Int J Adv Manuf Technol

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In large volume manufacturing, moving heavy components around manufacturing facilities to machine features on them can represent a significant proportion of the parts final cost because the tools used for this require a high initial investment and operating costs. This motivates interest in robotic machining so that the "process-to-part" concept can be employed. However, typical industrial robots lack the positional capability of conventional equipment, which ultimately results in dimensional errors in the features machined. This research investigates accumulation of error originating from non-cutting stages of robotic machining programs, using a hexapod robot. This is done using a procedure adapted from ISO 9283-Manipulating Industrial Robots-Performance Criteria and Related Test Methods to determine positional accuracy and repeatability, i.e. systematic and random errors. This concludes that, although the robot encounters high levels of error prior to cutting, a portion of these may be offset with in-situ condition monitoring to facilitate higher tolerance machining. Potential is therefore found for using robot machining for manufacturing cost reduction in the large-scale manufacturing industries.

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Section: Performance Driftmentioning

confidence: 99%

Positional capability of a hexapod robot for machining applications

Barnfather

Goodfellow

Abram

2016

Int J Adv Manuf Technol

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“…The measurements were performed in the MIKES nanometrology laboratory with a temperature stability of 20.0 AE 0.1°C. 17 The relative humidity stays at 47 AE 2%.…”

Section: Laser Interferometer Measurementmentioning

confidence: 99%

Quasidynamic calibration of stroboscopic scanning white light interferometer with a transfer standard

et al. 2013

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Abstract. A stroboscopic scanning white light interferometer (SSWLI) can characterize both static features and motion in micro(nano)electromechanical system devices. SSWLI measurement results should be linked to the meter definition to be comparable and unambiguous. This traceability is achieved by careful error characterization and calibration of the interferometer. The main challenge in vertical scale calibration is to have a reference device with reproducible out-of-plane movement. A piezo-scanned flexure guided stage with capacitive sensor feedback was attached to a mirror and an Invar steel holder with a reference plane-forming a transfer standard that was calibrated by laser interferometry with 2.3 nm uncertainty. The moving mirror vertical position was then measured with the SSWLI, relative to the reference plane, between successive mirror position steppings. A lightemitting diode pulsed at 100 Hz with 0.5% duty cycle synchronized to the CCD camera and a halogen light source were used. Inside the scanned 14 μm range, the measured SSWLI scale amplification coefficient error was 0.12% with 4.5 nm repeatability of the steps. For SWLI measurements using a halogen lamp, the corresponding results were 0.05% and 6.7 nm. The presented methodology should permit accurate traceable calibration of the vertical scale of any SWLI.

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“…• C ± 1 • C, 45% ± 3% RH), where the weighing was performed (Lassila et al 2011). This was done because right after the collection, the filter masses were significantly higher, due to humidity and/or excess hydrocarbons, than after proper stabilization.…”

Section: Gravimetric Samplingmentioning

confidence: 99%

Study of the PM Gas-Phase Filter Artifact Using a Setup for Mixing Diesel-Like Soot and Hydrocarbons

Högström

Karjalainen

Yli-Ojanperä

et al. 2012

Aerosol Science and Technology

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The filter artifact is a significant source of error in gravimetric measurements of particulate matter (PM) exhaust. However, only a few studies on the subject exist. Results from these studies show a large discrepancy mainly because the experiments were performed using real diesel vehicle exhaust with varying exhaust composition. In this study, a setup for mixing diesel-like soot and hydrocarbon vapor was constructed for generating a stable exhaust aerosol with adjustable composition. The particle size distribution of the diesel-fueled soot generator (GMD [geometric mean diameter] adjustable between 27 and 164 nm) was found to represent "real" exhaust particulate emission. This setup was applied for studying the filter artifact on Teflon-coated glass fiber filters using pentadecane as the hydrocarbon vapor. Experiments were performed using particle and hydrocarbon concentrations of 130-700 µg/m 3 and 10-12 ppm, respectively. It was found that the particle concentration of the aerosol affects the filter artifact. At lower particle concentrations, more hydrocarbon adsorption was detected. In the absence of particles, the adsorption was highest. Furthermore, filter soot load, corresponding to 0.13%-0.66% of the clean filter mass, was found to affect adsorption. Sooty filters adsorbed less vapor than clean filters. However, increasing the soot load resulted in more adsorption. Moreover, it was found that the backup filter serves as a reasonable estimate of the filter artifact only for low particle concentrations and filter soot loads. These results indicate that the filter soot load is an important parameter influencing the filter artifact, and therefore, it should be considered when performing gravimetric sampling. The setup was proven to be a unique tool for quantitative studies of the filter artifact.

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Design and performance of an advanced metrology building for MIKES

Cited by 32 publications

References 6 publications

Positional capability of a hexapod robot for machining applications

Positional capability of a hexapod robot for machining applications

Quasidynamic calibration of stroboscopic scanning white light interferometer with a transfer standard

Study of the PM Gas-Phase Filter Artifact Using a Setup for Mixing Diesel-Like Soot and Hydrocarbons

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