Design and optimization of laminated piezoresistive microcantilever sensors

Wang, Zheyao; Yue, Ruifeng; Zhang, Ruoxin; Liu, Litian

doi:10.1016/j.sna.2004.12.006

Cited by 32 publications

(26 citation statements)

References 53 publications

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“…These specifications are typical for a piezoresistive cantilever biosensor used for antigen-antibody detection applications. The initial device dimensions (mentioned in Table I) are chosen by analytical models 27,29 to satisfy the aforementioned specifications.…”

Section: Figmentioning

confidence: 99%

In silico modeling and investigation of self-heating effects in composite nano cantilever biosensors with integrated piezoresistors

Mathew

Sankar

2017

AIP Advances

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Over the years, piezoresistive nano cantilever sensors have been extensively investigated for various biological sensing applications. Piezoresistive cantilever sensor is a composite structure with different materials constituting its various layers. Design and modeling of such sensors become challenging since their response is governed by the interplay between their geometrical and constituent material parameters. Even though, piezoresistive nano cantilever biosensors have several advantages, they suffer from a limitation in the form of self-heating induced inaccuracy which is seldom considered in design stages. Although, a few simplified mathematical models have been reported which incorporate the self-heating effect, several assumptions made in the modeling stages result in inaccuracy in predicting sensor terminal response. In this paper, we model and investigate the effect of self-heating on the thermo-electro-mechanical response of piezoresistive cantilever sensors as a function of the relative geometries of the piezoresistor and the cantilever platform. Finite element method (FEM) based numerical computations are used to model the target-receptor interactions induced surface stress response in steady state and maximize the electrical sensitivity to thermal sensitivity ratio of the sensor. Simulation results show that the conduction mode of heat transfer is the dominant heat transfer mechanism. Furthermore, the isolation and immobilization layers play a critical role in determining the thermal sensitivity of the sensor. It is found that the shorter and wider cantilever platforms are more suitable to reduce self-heating induced inaccuracies. In addition, results depict that the piezoresistor width plays a more dominant role in determining the thermal drift induced inaccuracies compared to the piezoresistor length. It is found that for surface stress sensors at large piezoresistor width, the electrical sensitivity to thermal sensitivity ratio improves.

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Section: Figmentioning

confidence: 99%

In silico modeling and investigation of self-heating effects in composite nano cantilever biosensors with integrated piezoresistors

Mathew

Sankar

2017

AIP Advances

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“…The wheatstone bridge setup is a well known one to find the resistance change. The change in piezoresistor is linearly related to the applied stress and the strain developed (9,11,12). The resistance change is found using the bridge circuit made up of a combination of four peizoresistors as shown in Fig.2.…”

Section: International Journal Of Computer Applications (0975 -8887) mentioning

confidence: 99%

Peizoresistive Mems Cantilever Based Co2 Gas Sensor

Subhashini¹,

Juliet²

2012

Int. Jour. Intel. Elec. Sys.

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A study about the piezoresistive Micro-Electro-Mechanical Systems (MEMS) cantilever for a chemical sensitive -mass based sensor has been carried out to enhance sensor sensitivity. The sensitive region attracts the CO2 molecules there by introducing the stress concentration region (SCR). Three types of SCR geometry designs were first analysed using Intellisuite software to study the effect of stress and its distribution when varying mass is applied at the SCR. The results showed that the rectangular SCR design has the highest stress and showed a linear relation too when compared to the other types. Then, the length of rectangular SCR is varied to study the stress distribution along the cantilever. The piezoresistive element was then placed at various positions to obtain the highest stress resulting due to the deflection of the cantilever. The impact due the SCR was also analysed. The testing results of this piezoresistive MEMS cantilever with rectangular SCR had successfully enhanced sensitivity compared to the piezoresistive MEMS cantilever without SCR when varying mass is applied. Therefore this SCR approach appears to be suitable for enhancing the sensitivity of a massbased piezoresistive MEMS cantilever sensor. General Terms CO2 Gas Sensor using MEMS

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“…13,37 However, due to the degree of parameter coupling, this approach does not typically find the global optimum.…”

Section: F Iterative Optimizationmentioning

confidence: 99%

“…26. In previous work, it has not been uncommon to operate the cantilever with a noise ratio of 100:1 or greater 13 which leads to suboptimal performance.…”

Section: B Balancing the Noisementioning

confidence: 99%