Design and optimization of high quality factor MEMS piezoelectric resonator with pseudo electrodes

Paliwal, Nidhi; Mukhija, Neha; Bhatia, Deepak

doi:10.1109/icrito.2015.7359360

Cited by 3 publications

(1 citation statement)

References 5 publications

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“…In the previous decades, a lot of research has been done in the field of energy harvesting. The enhancement in this research has revolutionized in wireless technology and electronic devices like Micro-Electro-Mechanical Systems (MEMS) [4].…”

Section: Introductionmentioning

confidence: 99%

Investigation of Electrical Properties & Mechanical Quality Factor of Piezoelectric Material (PZT-4A)

Butt¹,

Anjum²,

Sultan³

et al. 2017

Journal of Electrical Engineering and Technology

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-Piezoelectricity is the capability of a piezoelectric material to change mechanical energy into electrical energy. The determination of electrical and mechanical properties plays a significant role in characterizing the piezoelectric material. The energy losses characteristics of piezoelectric material can be described by mechanical quality factor. In this paper, the output voltage and mechanical quality factor of Lead Zirconate Titanate (PZT-4A) piezoelectric material is determined under various resistance and loading conditions by using the test setup. The commercial FEM software ABAQUS is used to analyze the performance of piezoelectric material under static loading conditions. It is observed that these properties affect the performance of a material particularly in the designing of smart structures. The experimental results are partially compared to the simulation values.

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Section: Introductionmentioning

confidence: 99%