2018
DOI: 10.1109/jphot.2018.2849383
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Design and Optimization of an Al Doped ZnO in Si-Slot for Gas Sensing

Abstract: A Silicon waveguide incorporating a vertical slot filled with Al +3 doped ZnO is proposed for gas sensing. The effect of different device parameters, namely, slot-height, slot-width, and Si-width on two key optical features related to sensing, that is, difference in effective index and differential modal loss, before and after the exposure to gas are investigated using a fully-vectoral finite element method. The optimized sensor with a slot height of 400 nm, slot width of 100 nm and Si width of 65 nm yields th… Show more

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Cited by 4 publications
(2 citation statements)
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References 24 publications
(26 reference statements)
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“…We ran the SERS simulation over 1 million time steps corresponding to more than 2000 round trips through the structure and no numerical instabilities has been observed. However, some other weaknesses of numerical analysis such as inconsideration of lossy medium to find the fundamental mode's equivalent refractive index [31,32] should be studied and is suggested as the extension of the present work.…”
Section: Methods Mpumentioning
confidence: 99%
“…We ran the SERS simulation over 1 million time steps corresponding to more than 2000 round trips through the structure and no numerical instabilities has been observed. However, some other weaknesses of numerical analysis such as inconsideration of lossy medium to find the fundamental mode's equivalent refractive index [31,32] should be studied and is suggested as the extension of the present work.…”
Section: Methods Mpumentioning
confidence: 99%
“…In the beginning the method was applied for mechanical structural analysis, in Civil [2] and Aeronautical Engineering [3]. The FEM is, in our days, one of the most important numerical methods used in simulation in different areas [4], namely in biomedical applications [5], [6], in the optimization [7], design and simulation of electrical, electronic and optical devices [8]. The importance of the method is mainly due to its ability to handle problems with complicated geometries and irregular boundaries.…”
Section: Introductionmentioning
confidence: 99%