“…To use the SMA as both an actuator/sensor provides enormous advantages in cost reduction and optimization of several parts/systems/devices. The microelectromechanical systems (MEMS) can use this advantage by phase transition into NiTi thin films, to apply as pressure gauge (sensor) and react by electrical behavior (actuator) to assure sealing, as well as security of the system through smaller design, due to its high recoverable strain and output forces [11]. The challenge here is to design the NiTi thin films with the required thickness to assure the properties and alloy composition [9][10][11][12].…”