Design and Modeling of Fiber-Free Optical MEMS Accelerometer Enabling 3D Measurements

Abozyd, Samir; Toraya, Abdelrahman; Gaber, Noha

doi:10.3390/mi13030343

Cited by 13 publications

(9 citation statements)

References 29 publications

(29 reference statements)

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“…Near-infrared (NIR) photodetection has become increasingly vital in various fields, including imaging [1][2][3] , telecommunications 4 , optical inertial sensors 5,6 , medical diagnostics 7 , environmental monitoring 8 , and spectroscopy [9][10][11] . The field of NIR photodetection encompasses a wide range of technologies, each with its own distinct advantages and limitations.…”

Section: Introductionmentioning

confidence: 99%

Spectral compensation of extended InGaAs photodetector thermal drift in miniaturized FTIR spectral sensors

Abozyd,

Mortada,

Saied

et al. 2024

MOEMS and Miniaturized Systems XXIII

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InGaAs NIR photodetectors are widely used due to their high responsivity, low noise, low dark current, fast response time, and large spectral range, which covers a range of 900 to 1700 nm and can be extended up to a 2600 nm cutoff. However, thermal drift is a major challenge that can affect the responsivity of these photodetectors, especially in miniaturized systems, where the thermal management problem is challenging. InGaAs photodetectors exhibit a highly nonlinear increase in responsivity near the cutoff, with an increase of about 4%/°C and a nonlinear reduction of about 0.25%/°C in the middle of the spectral range. This nonlinear drift cannot be corrected by common pre-processing methods used in spectroscopy. The change in responsivity near the cutoff is due to thermal-assisted bandgap reduction, while the change in responsivity in the middle of the spectral range is not well described in the literature. To address this issue, we applied the Urbach tail formula to model the nonlinear reduction of responsivity in the middle of the spectral range. The model showed an accuracy of approximately 90% compared to experimental thermal drift, allowing us to deduce the root causes of this phenomenon. Finally, we proposed compensation methods for the thermal drift, which were investigated using MOEMS FTIR spectral sensors as a case study. Some of these methods successfully reduced the drift that occurs due to a 60°C temperature change to less than 3%.

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Section: Introductionmentioning

confidence: 99%

Spectral compensation of extended InGaAs photodetector thermal drift in miniaturized FTIR spectral sensors

Abozyd,

Mortada,

Saied

et al. 2024

MOEMS and Miniaturized Systems XXIII

Self Cite

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“…The use of OMAS allows accurate measurements over long periods [7] and they are not influenced by electromagnetic disturbances [8].…”

Section: Introductionmentioning

confidence: 99%

Designs of Optomechanical Acceleration Sensors with the Natural Frequency from 5 Hz to 50 kHz

Rezinkina,

Braxmaier

2024

Designs

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In many applications, such as space navigation, metrology, testing, and geodesy, it is necessary to measure accelerations with frequencies ranging from fractions of a hertz to several kilohertz. For this purpose, optomechanical sensors are used. The natural frequency of such sensors should be approximately ten times greater than the frequency of the measured acceleration. In the case of triaxial acceleration measurements, a planar design with two sensors that measure accelerations in two perpendicular in-plane directions and a third sensor that measures out-of-plane acceleration is effective. The mechanical characteristics of the existing designs of both in-plane and out-of-plane types of sensors were analyzed, and the improved designs were elaborated. Using numerical simulation, the dependencies of the natural frequency level in the range from several hertz to tens of kilohertz on the designs and geometric parameters of opto-mechanical accelerometers were modeled. This allows one to select the accelerometer design and its parameters to measure the acceleration at the assigned frequency. It is shown that the opto-mechanical accelerometers of the proposed designs have reduced dissipation losses and crosstalk.

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“…The majority of MOEM accelerometers are uniaxial, because the optical conversion of the displacement into an electrical signal should allow for distinguishing the direction of the proof mass displacement, which is not always possible for the aforementioned methods. However, Abozyd et al [26] presented a triaxial MOEM accelerometer in which the proof mass was suspended on four elastic elements that allowed it to displace in three dimensions. The proof mass displacement was altering the light flux traveling to the four optical detectors.…”

Section: Introductionmentioning

confidence: 99%

The Design, Modeling and Experimental Investigation of a Micro-G Microoptoelectromechanical Accelerometer with an Optical Tunneling Measuring Transducer

Barbin,

Nesterenko,

Koleda

et al. 2024

Sensors

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This treatise studies a microoptoelectromechanical accelerometer (MOEMA) with an optical measuring transducer built according to the optical tunneling principle (evanescent coupling). The work discusses the design of the accelerometer’s microelectromechanical sensing element (MSE) and states the requirements for the design to achieve a sensitivity threshold of 1 µg m/s2 at a calculated eigenvalue of the MSE. The studies cover the selection of the dimensions, mass, eigenfrequency and corresponding stiffness of the spring suspension, gravity-induced cross-displacements. The authors propose and experimentally test an optical transducer positioning system represented by a capacitive actuator. This approach allows avoiding the restrictions in the fabrication of the transducer conditioned by the extremely high aspect ratio of deep silicon etching (more than 100). The designed MOEMA is tested on three manufactured prototypes. The experiments show that the sensitivity threshold of the accelerometers is 2 µg. For the dynamic range from minus 0.01 g to plus 0.01 g, the average nonlinearity of the accelerometers’ characteristics ranges from 0.7% to 1.62%. For the maximum dynamic range from minus 0.015 g to plus 0.05 g, the nonlinearity ranges from 2.34% to 2.9%, having the maximum deviation at the edges of the regions. The power gain of the three prototypes of accelerometers varies from 12.321 mW/g to 26.472 mW/g. The results provide broad prospects for the application of the proposed solutions in integrated inertial devices.

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Design and Modeling of Fiber-Free Optical MEMS Accelerometer Enabling 3D Measurements

Cited by 13 publications

References 29 publications

Spectral compensation of extended InGaAs photodetector thermal drift in miniaturized FTIR spectral sensors

Spectral compensation of extended InGaAs photodetector thermal drift in miniaturized FTIR spectral sensors

Designs of Optomechanical Acceleration Sensors with the Natural Frequency from 5 Hz to 50 kHz

The Design, Modeling and Experimental Investigation of a Micro-G Microoptoelectromechanical Accelerometer with an Optical Tunneling Measuring Transducer

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