Design and Modeling of a Decoupled 2-DOF Stick-slip Positioning Stage

Piezoelectric stick-slip actuators with flexure hinge mechanisms: A review

“…Wang et al (2019d) designed a twodegree-of-freedom FHMs-PSSA based on the surface's rectangular trajectory driving; two piezoelectric stacks were responsible for driving in both positive and negative directions, and the other was used as a switch for rotational motion and translational motion; the actuator could achieve a linear stroke of 50 mm and a rotation of 360°, and the corresponding resolutions were 19.85 nm and 1.32 mrad, respectively. As shown in Figure 8(b), Tian et al (2019Tian et al ( , 2022 proposed a multi-DOF FHMs-PSSA with series-parallel decoupling mechanism to achieve a more compact structure; although the sliders of the platform were still arranged in series in structure, the driving units were decoupled in parallel, which was more conducive to reducing the coupling error; moreover, to study the influence of the friction interface's contact force on the backward motion, the friction regulation unit was added in the direction perpendicular to the driving direction.…”

“…By using the elastic deformation of the cantilever beam, Xu et al (2020) designed a parallel FHMs-PSSA with measurable contact force; with a decrease of the contact force, the resonance frequency decreased, and the backward motion disappeared completely. There were also some FHMs-PSSAs designed with compact structures (Oubellil et al, 2019; Qin et al, 2019c; Tian et al, 2019), which achieved large horizontal thrust or load capacity by introducing the flexure hinge mechanisms. For example, as shown in Figure 4(f), Zhong et al (2019b) proposed an FHMs-PSSA; the volume was 30 × 17 × 17.5 mm 3 ; the vertical and horizontal load capacities were 6.1 and 25 N, respectively; the maximum speed was 12 mm/s, and the resolution reached 5 nm.…”

“…Unidirectional coupling type multi-DOF FHMs-PSSA: (a) nanomanipulation system for handling nanowires by Zhang et al (2013) and (b) multi-DOF FHMs-PSSA by Tian et al (2019). Multi-directional coupling type multi-DOF FHMs-PSSA: (c) multi-DOF FHMs-PSSA by Adibnazari et al (2018); and (d) multi-DOF FHMs-PSSA by Shiratori et al (2012).…”

“…Additionally, the two superposed sines waveform and sine waveform usually excite the actuators for driving in the resonance state to improve the output power (Bansevicius and Blechertas, 2008;Chu et al, 2016;Lee et al, 2007;Nishimura et al, 2012;Pan et al, 2019;Suzuki et al, 2012;Yu et al, 2020). In many studies, the waveforms were introduced buffer stages at the rising or falling edge (Fan et al, 2019;Liu et al, 2019a;Qin et al, 2019c;Tang et al, 2020;Tian et al, 2019;Wang and Lu, 2012;Yang et al, 2019Yang et al, , 2020bZhong et al, 2019aZhong et al, , 2019bZhong et al, , 2020Zhu et al, 2018), see Figure 2(h); the works of Wang et al and Zhong et al stated that the waveforms introduced the buffer stages got better driving performance, including step displacement and speed, which are presented in Table 1. This is owing to the creep characteristics of piezoelectric transducers, and a proper buffer stage is helpful to make them elongate more fully and contract more effectively, so the waveform with buffer stage is often used in practical applications as well.…”

Review on Multiple‐Degree‐of‐Freedom Cross‐Scale Piezoelectric Actuation Technology

“…Deng et al proposed a compact piezoelectric XY platform with the size of 100 Â 100 Â 93.5 mm 3 based on a single actuator, [214] which achieved the large stroke of 15 Â 15 mm 2 and the positioning resolution better than 400 nm; the platform achieved the carrying capacity of 20 kg, and the maximum velocities along X and Y axes were 2.13 and 3.11 mm s À1 under the voltage of 400 V p-p and the frequency of 600 Hz, respectively. Tian et al proposed a 2-DOF inertial positioning stage with large stroke, [215] which consisted of a clamping mechanism used to adjust the normal force at the friction interface and a hybrid decoupling configuration used to eliminate the coupling error. Shimizu et al [216] proposed an XY micro/nanopositioning stage with the size of 24 Â 24 Â 5 mm 3 based on the stick-slip actuation principle, which used the leaf springs to guide the X/Y directional motions of moving plate; the proposed stage achieved range of AE1 Â AE1 mm 2 with the resolution of 10 nm in X/Y directions.…”