Design and modeling of a MEMS bidirectional vertical thermal actuator

Dong, Yan; Khajepour, Amir; Mansour, Raafat R.

doi:10.1088/0960-1317/14/7/002

Cited by 92 publications

(75 citation statements)

References 11 publications

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“…Thermal actuators deliver larger forces and are easier to fabricate, compared with other operational modes [106]. Additionally, because thermal microactuators do not interfere with electron beam or ion beam analysis, the thermal actuation mechanism can be incorporated into high-vacuum systems for in-situ investigation of the sample in question.…”

Section: Design and Fabricationmentioning

confidence: 99%

Hybrid 3D printing by bridging micro/nano processes

Yoon

Jang

Kim

et al. 2017

J. Micromech. Microeng.

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The aim of this work was to develop a novel hybrid manufacturing method for nanoscale three-dimensional (3D) printing with multi-material capabilities. 3D structuring methods at the micro/nanoscale are major goals of various engineering fields, and much work has been carried out to improve the minimum feature size, geometrical complexity, and material selection. With the aim of nanoscale multimaterial printing, a hybrid process was reported with an integrated nanoparticle deposition system (NPDS) and focused ion beam (FIB) system; however this process has limitations in terms of surface roughness and control over the layer thickness, as well as with the process scale, and furthermore, lack of sacrificial layers.In this dissertation, a novel hybrid process is described, which combines aerodynamically focused nanoparticle (AFN) printing, micro-machining and focused ion beam (FIB) milling. AFN printing is based on NPDS, and micromachining was used for local planarization. In addition to these processes, spincoating was used to fabricate sacrificial layers. By bridging these different II micro/nanoscale processes, the resulting hybrid process can address the limitations of the individual processes.To create the hybrid process, each process was investigated to enable compatibility. With the AFN printing system, the surface morphology of a detached substrate was observed, and the bonding mechanism between the substrate and nanoparticles was investigated. A novel printing strategy was identified to reduce the scale of the process. With the micro-machining system, different tool geometries were investigated. Complex geometries inspired by conventional-scale tools were implemented on the micro-scale, and their effects were investigated. With the FIB system, material re-deposition phenomena were investigated to reduce defects that occur during ion sputtering. A novel path-generation strategy was identified and investigated for different scanning paths.Process capability is discussed using fabrication examples and functional applications. The novel hybrid process represents a significant advance in the state of the art, and enables far improved process scales or dimensional degree of freedom, without losing the advantages of broad choice of materials.3D-pinted micro bi-material cantilevers were fabricated as a thermal actuator.The mechanical and thermal properties of the structure were investigated using an in-situ measurement system, and irregular thermal phenomena were analyzed. It is expected that these in-situ measurements of the 3D printed microstructure will contribute to materials research.Various 3D structures can be fabricated using the process described here from a range of metal/ceramic inorganic materials, including polymers. In particular, it is expected that the process will contribute to the area of customized nanoscale structuring, with potential applications in medical treatments. It is also expected that this work will contribute to further improvements in manufacturing technology by combining different m...

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Section: Design and Fabricationmentioning

confidence: 99%

Hybrid 3D printing by bridging micro/nano processes

Yoon

Jang

Kim

et al. 2017

J. Micromech. Microeng.

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show abstract

“…In [38], analytical expressions for temperature profile were obtained for fixed micromachined polysilicon beams carrying electrical current; however, the effect of thermal expansion was not considered and the equations are only valid for sufficiently high current values. Another analysis was also presented for a bidirectional vertical thermal bimorph actuator in [39]; however, no temperature dependency was considered for the electrical resistivity. Under stationary conditions, temperature profile of the arm can be approximated by the following one dimensional heat equation: (20) whereT = T (s) − T amb is the temperature increase of the arm at position s on the beam (the s-axis coincides on the beam as shown in Fig.…”

Section: B Nonlinear Temperature Profilementioning

confidence: 99%

Analysis of Nonlinear Phenomena in a Thermal Micro-Actuator With a Built-In Thermal Position Sensor

et al. 2012

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Abstract-An analysis of nonlinear effects associated with a chevron thermal micro-actuator with a built in thermal position sensor under static conditions is presented in this paper. The nonlinearities present in both actuator and sensor are studied. The phenomena considered for the sensor include: thermal coupling from actuator to sensor and temperature dependence of electrical resistivity. Those considered for the actuator include: non-uniform spatial distribution of temperature in arms, temperature dependency of thermal expansion coefficient, deviation of arm shape from straight line due to physical constraints, and temperature dependence of electrical resistivity.

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“…Recently, several studies have investigated the paddletype MEMS/NEMS as sensors [8], actuators [9], resonators [10], capacitors, and lters [8][9][10][11]. Qian et al [12] developed a capacitive paddle-type NEMS switch fabricated from silicon nanowires.…”

Section: Introductionmentioning

confidence: 99%

The size-dependent electromechanical instability of double-sided and paddle-type actuators in centrifugal and Casimir force fields

et al. 2017

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Abstract. The present research is devoted to theoretical study of the pull-in performance of double-sided and paddle-type NEMS actuators fabricated from cylindrical nanowire operating in the Casimir regime and in the presence of the centrifugal force. D'Alembert's principle was used to transform the angular velocity into an equivalent static, centrifugal force. Using the couple stress theory, the constitutive equations of the actuators were derived. The equivalent boundary condition technique was applied to obtain the governing equation of the paddle-type actuator. Three distinct approaches, the DuanAdomian Method (DAM), Finite Di erence Method (FDM), and Lumped Parameter Model (LPM), were applied to solve the equation of motion of these two actuators. This study demonstrates the in uence of various parameters, i.e., the Casimir force, geometric characteristics, and the angular speed, on the pull-in performance.

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Design and modeling of a MEMS bidirectional vertical thermal actuator

Cited by 92 publications

References 11 publications

Hybrid 3D printing by bridging micro/nano processes

Hybrid 3D printing by bridging micro/nano processes

Analysis of Nonlinear Phenomena in a Thermal Micro-Actuator With a Built-In Thermal Position Sensor

The size-dependent electromechanical instability of double-sided and paddle-type actuators in centrifugal and Casimir force fields

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