Design and Implementation of a Dual-Mass MEMS Gyroscope with High Shock Resistance

Gao, Yimin; Huang, Libin; Ding, Xu Chu; Li, Hongsheng

doi:10.3390/s18041037

Cited by 8 publications

(8 citation statements)

References 24 publications

(29 reference statements)

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“…In this simulation, the parameters of the structure, material properties of silicon, mesh division and element type are the same as those of the modal analysis. According to previous experimental results, the quality factor of MEMS gyroscopes is about 3000–8000 [33]. In this analysis, when the quality factor of type B is 4000, the quality factor of types A1, A2 and A3 can be calculated by the previous assumptions and defined as 6328, 6565 and 6605, respectively.…”

Section: Fem Simulation and Analysismentioning

confidence: 94%

“…Therefore, the lever, frame and proof mass are simplified to inelastic mass and beam to massless spring. It is worth mention here that the lumped-parameter model used in this study is based on linear elastic material behavior, which is very widely used in the research of TFG [6,14,21,33,34,35]. Furthermore, the nonlinear analysis of the overall structure will be discussed in detail later.…”

Section: Theoretical Analysismentioning

confidence: 99%

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Design and Mechanical Sensitivity Analysis of a MEMS Tuning Fork Gyroscope with an Anchored Leverage Mechanism

Gao

Jin

et al. 2019

Sensors

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This paper presents the design and analysis of a new micro-electro-mechanical system (MEMS) tuning fork gyroscope (TFG), which can effectively improve the mechanical sensitivity of the gyroscope sense-mode by the designed leverage mechanism. A micromachined TFG with an anchored leverage mechanism is designed. The dynamics and mechanical sensitivity of the design are theoretically analyzed. The improvement rate of mechanical sensitivity (IRMS) is introduced to represent the optimization effect of the new structure compared with the conventional one. The analytical solutions illustrate that the IRMS monotonically increases with increased stiffness ratio of the power arm (SRPA) but decreases with increased stiffness ratio of the resistance arm (SRRA). Therefore, three types of gyro structures with different stiffness ratios are designed. The mechanical sensitivities increased by 79.10%, 81.33% and 68.06% by theoretical calculation. Additionally, FEM simulation demonstrates that the mechanical sensitivity of the design is in accord with theoretical results. The linearity of design is analyzed, too. Consequently, the proposed new anchored leverage mechanism TFG offers a higher displacement output of sense mode to improve the mechanical sensitivity.

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Section: Fem Simulation and Analysismentioning

confidence: 94%

Section: Theoretical Analysismentioning

confidence: 99%

Design and Mechanical Sensitivity Analysis of a MEMS Tuning Fork Gyroscope with an Anchored Leverage Mechanism

Gao

Jin

et al. 2019

Sensors

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show abstract

“…Consequently, to achieve a balance between impact resistance and mechanical sensitivity, Yang Gao increased the resonant frequency of the MEMS gyroscope and adopted a two-stage elastic baffle structure. The shock tests indicated that the proposed structure could withstand impacts of up to 10,000 g [ 54 ]. However, the baffle structures could potentially lead to particle contamination and short circuits due to silicon residues generated during impact.…”

Section: Mems Reliability With Consideration Of Shockmentioning

confidence: 99%

Reliability of MEMS inertial devices in mechanical and thermal environments: A review

Xu,

Liu,

et al. 2024

Heliyon

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“…Based on the deep dry silicon on glass (DDSOG) processing technology, a single-chip integrated accelerometer gyroscope is proposed. The procedures of the DDSOG technology are shown in Figure 4 [24]. The DDSOG process is simple and the yield is high.…”

Section: Design Of the Whole Structure Of Single-chip Integrated Acce...mentioning

confidence: 99%

Design and Simulation of a Novel Single-Chip Integrated MEMS Accelerometer Gyroscope

et al. 2022

Self Cite

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This paper presents the design and simulation of a single-chip integrated MEMS accelerometer gyroscope by integrating a Coriolis vibratory ring gyroscope and a differential resonant accelerometer into one single-chip structure, measuring both the acceleration and the angular velocity (or the angle). At the same time, it has the advantages of small volume, low cost, and high precision based on the characteristics of a ring gyroscope and resonant accelerometer. The proposed structure consists of a microring gyroscope and a MEMS resonant accelerometer. Tthe accelerometer is located inside the gyroscope and the two structures are concentric. The operating mechanisms of the ring gyroscope and the resonant accelerometer are first introduced. Then, the whole structure of the proposed single-chip integrated accelerometer gyroscope is presented, and the structural components are introduced in detail. Modal analysis shows the resonant frequencies of upper and lower DETFs in resonant accelerometer are 28,944.8 Hz and 28,948.0 Hz, and the resonant frequencies of the ring gyroscope (n=2) are 15,768.5 Hz and 15,770.3 Hz, respectively. The scale factor of the resonant accelerometer is calculated as 83.5 Hz/g by the analysis of the input–output characteristic. Finally, the thermal analysis fully demonstrates that the single-chip integrated accelerometer gyroscope has excellent immunity to temperature change.

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Design and Implementation of a Dual-Mass MEMS Gyroscope with High Shock Resistance

Cited by 8 publications

References 24 publications

Design and Mechanical Sensitivity Analysis of a MEMS Tuning Fork Gyroscope with an Anchored Leverage Mechanism

Design and Mechanical Sensitivity Analysis of a MEMS Tuning Fork Gyroscope with an Anchored Leverage Mechanism

Reliability of MEMS inertial devices in mechanical and thermal environments: A review

Design and Simulation of a Novel Single-Chip Integrated MEMS Accelerometer Gyroscope

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