Design and fabrication technology of thinned backside-excited CCD imagers and the family of the intensified electron-bombarded CCD image tubes

Dalinenko, Ilia Nikolaevic; Malyarov, Alexandre Victorovic; Vishnevsky, Grigory I.; Vydrevitch, Michail G.; Kossov, V.; Lazovsky, Leonid Yu.; Golovkin, S.V.

doi:10.1117/12.218631

Cited by 2 publications

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“…This sensor has excellent low light level performance. It can provide useable video signal in iO Ix and below illumination [2] A new approach of high sensitive EBCCD system has been developed in which a high sensitive mega-pixel EBCCD sensor employed. The sensor has a multi-alkali photo cathode, electrostatic focusing with an inverse image (Magnification = 0.56) and a back illuminated CCD chip whose pixel number is 1024X 1024 (pixel size is 13.3 X 13.3 i-t m2) at the image place.…”

Section: Introductionmentioning

confidence: 99%

<title>Aliasing phenomenon in EBCCD imaging</title>

et al. 2002

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Research into limited resolution of EBCCD and experiments have been reported in the present paper.Rules in EBCCD imaging for resolution chart (stripe pattem) ofdifferent frequencies have been found.It's possible to output stripe pattern image even if the frequency of input chart is higher than the Nyquist frequency of the system (the phenomenon calls aliasing). It can be explained by frequency spectrum. Modulation transfer function has been tested. It shows that EBCCD system has a certain imaging ability to high frequency (higher than Nyquist frequency) image. This provides the possibility ofthe EBCCD system in imaging for resolution chart ofhigh frequency.

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Section: Introductionmentioning

confidence: 99%

<title>Aliasing phenomenon in EBCCD imaging</title>

et al. 2002

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The Megapixel EBCCD: A high-resolution imaging tube sensitive to single photons

Buontempo

Chiodi²,

Dalinenko

et al. 1998

Nuclear Instruments and Methods in Physics Research Section A:

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A h ybrid image-intensier tube, suitable for extremely low-light imaging, has been tested. This device is based on an Electron-Bombarded CCD chip (EBCCD) with 1024 1024 sensitive pixels. The tube, which has a photocathode diameter of 40 mm, is gateable and zoomable, with an image magnication varying from 0.62 to 1.3. The high gain (about 4000 collected electrons per photoelectron at the operational voltage of 15 kV) and the relatively low noise (180 electrons per pixel at 10 MHz pixelreadout frequency), allows single-photoelectron signals to be separated from noise with a signal-to-noise ratio greater than 10. By applying an appropriate threshold on the signal amplitude, the background can almost be eliminated, with a loss of few percent in single-photoelectron counting. High inner gain, low noise, single-photoelectron sensitivity, and high spatial resolution make the EBCCD imaging tube a unique device, attractive for many applications in high-energy physics, astrophysics, biomedical diagnostics.

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Design and fabrication technology of thinned backside-excited CCD imagers and the family of the intensified electron-bombarded CCD image tubes

Cited by 2 publications

References 0 publications

<title>Aliasing phenomenon in EBCCD imaging</title>

<title>Aliasing phenomenon in EBCCD imaging</title>

The Megapixel EBCCD: A high-resolution imaging tube sensitive to single photons

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