Design and fabrication of thin film resistive heaters for hybrid optoelectronic packaging

Datta, M.; Whaley, R.D.; Dagenais, M.

doi:10.1109/tadvp.2002.807605

Cited by 7 publications

(3 citation statements)

References 12 publications

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“…However, if the amount of solder is kept low to begin with, the fiber shift is assumed to be low as well. Ideally, the thickness of the solder on top of the heater should be within [4][5] , so that it can be evaporated with precise thickness control. In our experiments, however, we used 12.5 thick AuSn preform, because we needed greater tolerance in the vertical (transverse) direction to compensate the thickness tolerances of laser submount , fiber ferrule (distance from the axis of the fiber hole to the flat base is ), the fused quartz substrate of the heater , and the solder layers underneath the quartz substrate and the laser submount.…”

Section: Characterization Of Fiber-shift and "Precompensation" Tementioning

confidence: 99%

“…which is an integral part of the fiber sub-assembly, as described in the following section. We have reported earlier about the thermal modeling and fabrication of the thin-film microheaters, which were tested separately outside the package [4]. The main focus of the present paper is to report the concluding part of the earlier work demonstrating the utilization of the thin-film microheater as an integral part of the fiber sub-assembly to achieve high coupling efficiency, as described in the following section.…”

Section: Introductionmentioning

confidence: 99%

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Solder-Assembled High Coupling Efficiency Single-Mode Laser Modules Using Micro-Heaters and Precompensation Technique

Datta

Dagenais

2004

IEEE Trans. Comp. Packag. Technol.

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In this paper, we are proposing a hybrid integration platform, on which a single-mode lensed fiber can be actively aligned to a semiconductor laser, and then solder-attached to the platform with the help of on-board thin-film heaters. We have demonstrated 50% coupling efficiency with conically lensed single-mode fibers, bonded with gold-tin (AuSn) eutectic solder. The loss of alignment due to solder solidification has been carefully measured and compensated during the subsequent correctional alignment step taking advantage of the reworkability feature of the solder-joint. Two types of fiber sub-assemblies have been tested: uncoated bare fiber housed within a metallized ceramic ferrule, and nickel/gold coated bare fiber directly solder-bonded to the platform. Statistical data confirms that in both the cases, 95% of the loss of original coupling was restored by the precompensation technique.Index Terms-Active alignment, lensed fiber, precompensation technique, solder attachment, thin-film microheaters.

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Section: Characterization Of Fiber-shift and "Precompensation" Tementioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Solder-Assembled High Coupling Efficiency Single-Mode Laser Modules Using Micro-Heaters and Precompensation Technique

Datta

Dagenais

2004

IEEE Trans. Comp. Packag. Technol.

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“…The wide channel will still favor thermal transpiration because of the cosine law most molecules will travel the distance to reach the height of the channel and collide with the channel wall first and a very few of them which will travel the distance along the width of the channel will collide with each other first before hitting the channel wall. This is even verified by the definition of hydraulic diameter which has to be of the order of the mean free path of the gas for [62]. The channel cover is formed by flip chip bonding glass or silicon to the silicon substrate [63,64].…”

Section: Lateral Design Microfabricated Knudsen Pumpmentioning

confidence: 95%

Thermally driven Knudsen gas pump enhanced with a thermoelectric material.

Pharas¹

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iii ACKNOWLEDGMENTS I am indebted to my advisor, Dr. Shamus McNamara, for this thesis. His abundant knowledge guided me right from the start to finish making sure the project headed in the right direction and the goals were achieved. He continued to educate and support me right from my Master's degree and it was under his able guidance that I was introduced to the exciting world of MEMS and microfabrication. Whether it was theory or the practical nuances of laboratory experiments he instilled the confidence within me and made me structure my independent thought process to carry out experiments with positive results. I have learned how to be a good researcher by following his principles. I developed the insight to observe minute details which could make a difference in the outcome of an experiment. He supported me financially as a research assistant in his laboratory and gave me the opportunity to work on multiple projects which broadened my horizon, which also included the cleanroom experience. This thesis was developed over a period of five years. The basic proof was already established by Dr. McNamara, while he was at the University of Michigan and by other researchers. I was very fortunate to have the opportunity to continue this project and to improve the performance of the project. The thesis focuses on improving the flowrate of the Knudsen gas pump. The Knudsen pump uses thermal transpiration as the driving mechanism to pump gas. It is a motionless gas pump as the pump does not require any moving actuators for pumping.The thermally driven gas flow is accomplished in the molecular or transitional gas flow regime. The advantage of this pump is that without any moving parts it avoids friction losses and stiction problems which devices in micro scale are prone to suffering due to scaling issues. Thus, this pump is highly robust and reliable. Knudsen pumps in the past have suffered from the drawback of low flowrates and inability to operate at atmospheric pressure. In the early days lack of micromachining technologies limited minimum channel size which had to be operated at lower than atmospheric pressure to achieve free molecular flow. Various designs have been implemented with an impetus on increasing the flowrate of the pump.The key to this pump is establishing a temperature difference along the length of the channel. A higher temperature difference over a shorter channel length makes the vi pump more efficient. Pump channels have been made out of various materials like silicon, glass and polymer. The silicon microfabricated single channel conventional design pump suffered from the high thermal conductivity of silicon, which limited the thermal gradient that could be achieved. Silicon was replaced by glass, which has a lower thermal conductivity. The glass micro fluidic pump could pump water in reservoirs but at a slow rate. Renewable forms of Knudsen pump were also made by using nanoporous silica colloidal crystals which are robust and could use solar energy and body heat to create a temperature difference ...

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Design and Construction of Deformable Heaters: Materials, Structure, and Applications

Zhou

2021

Adv Elect Materials

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The technological evolution presents us with infinite possibilities of deformable electronics, far beyond what is possible with conventional electronics. [9][10][11][12] For the past few years, heaters' development has grown rapidly due to wearable electronics' advances and the growing need for practical medical requirements. [13][14][15] The advantages of heaters, such as lightweight, good heating stability, and flexibility, make heaters generally a better choice than conventional heating elements. Various heaters applications have been reported, including deicing devices [16][17][18][19][20] , thermal management devices [21][22][23][24][25] , healthcare [26][27][28][29] , wearable sensors [30][31][32] , etc. For instance, heaters can provide the warmth required to extend the operating temperature of liquid crystal displays (LCDs) in cold environments or can increase the temperature for antifogging systems, anti-icing, deicing of optics, or optical displays [33,34] .Conventional rigid heaters are usually using semiconductor or metallic materials as the heating elements, which have demonstrated stable and excellent performance. For example, Rao and co-workers [35] fabricated a transparent heater by physically depositing Au on a quartz substrate and using an acrylic resin as a crack sacrificial template. It is a transparent conductor with a low sheet resistance of 5.4 Ω sq −1 and a high-temperature heater that can reach ≈600 °C within 38 s by applying a voltage of 15 V. However, the heater is restricted in many applications with portable needs, such as human motion detection, wearable electronics, etc., due to the rigid and thick quartz substrate.As shown in Figure 1a, conventional heaters always consist of a heating element and rigid substrate, and the working principle of electrical heaters is based on the Joule effect and thermal diffusion. However, inherently rigid substrate limits the applications of conventional heaters [36] . Flexible and stretchable heaters had gained tremendous attention with the advances of soft electronics. [37][38][39] Flexible heaters can adapt to moderate deformation, such as bending and twisting. [40,41] And stretchable heaters have more application scenarios due to their stretchable characteristics. [42,43] In the last few years, deformable heaters have gained rapid development due to their wide strain range, good repeatability and low density. [44] Figure 1b shows different structure designs of deformable heaters. One of the most significant advantages Conventional heaters have evolved from traditional rigid heaters to flexible heaters, stretchable heaters, and deformable heaters for the development of soft electronics. Film-based or filament-based heaters can be designed and engineered to fulfill the deformable, adaptable and stretchable applications. Compared with conventional heaters, deformable heaters can maintain stable electrothermal property even with large deformation. Based on this, deformable heaters have shown great potential to be used in the field of Internet of Thin...

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Design and fabrication of thin film resistive heaters for hybrid optoelectronic packaging

Cited by 7 publications

References 12 publications

Solder-Assembled High Coupling Efficiency Single-Mode Laser Modules Using Micro-Heaters and Precompensation Technique

Solder-Assembled High Coupling Efficiency Single-Mode Laser Modules Using Micro-Heaters and Precompensation Technique

Thermally driven Knudsen gas pump enhanced with a thermoelectric material.

Design and Construction of Deformable Heaters: Materials, Structure, and Applications

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