Design and Fabrication of the High Directional Ultrasonic Ranging Sensor to Enhance the Spatial Resolution

Lee, Haksue; Kang, Daesil; Moon, Wonkyu

doi:10.1109/sensor.2007.4300377

Cited by 4 publications

(3 citation statements)

References 2 publications

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“…In particular, considering the stress distribution in the radial direction, the piezoelectric layer is designed to be smaller than the diaphragm. The reason for this is that electromechanical coupling is more effective when the piezoelectric layer covers a smaller area in the center of the diaphragm, rather than the total area of the circular plate [29,30]. The driving and sensing parts can be regarded as a reciprocal transducer, and they can then be modeled by the ECM (equivalent circuit model), shown in figure 4.…”

Section: Unimorphic Piezoelectric Diaphragmmentioning

confidence: 99%

A micro-machined viscosity-variation monitoring device using propagation of acoustic waves in microchannels

Choi

Moon²,

Lim

2010

J. Micromech. Microeng.

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A new viscosity-variation monitoring device for measuring viscosity changes in small amounts of liquid in real time is designed and fabricated. The device is specifically developed to evaluate the physical characteristics of liquids that are readily changeable and/or difficult to obtain in larger quantities, such as biomaterials. It is capable of monitoring the viscosity variation of a sample as small as 13 nl. The device is composed of two chambers connected by multi-microchannels and is fabricated using MEMS (micro-electro-mechanical system) technology. Each chamber has a unimorphic piezoelectric diaphragm for generating and sensing sound waves. One chamber is regarded as an actuator and the other as a sensor. Viscosity variations can then be quickly and easily measured by detecting the signal output obtained from the sensor for either a continuous or tone-burst single-frequency input to the actuator. The performance of the device is ascertained by experiments performed on test samples with various viscosities.

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Section: Unimorphic Piezoelectric Diaphragmmentioning

confidence: 99%

A micro-machined viscosity-variation monitoring device using propagation of acoustic waves in microchannels

Choi

Moon²,

Lim

2010

J. Micromech. Microeng.

Self Cite

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“…Figure 4 (a) The displacement in polar direction on top surface along its length direction, (b) the stress distribution on top surface along its length direction Therefore, to achieve the maximum exciting sensitivity, the discrepancy of the stress between the center and the boundary on the Si layer should be maximized [3]. Out-of-phased driving in each PZT actuator or partially driving one of the PZT parts is required [6]. The paper pays attention to the latter by designing PZT film structures.…”

Section: Ecs Transactionsmentioning

confidence: 99%

FEA Based Design Optimization of Exciting Sensitivity for Micromachined Beam Ultrasonic Transducer

et al. 2009

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This paper presented a design optimization of piezoelectric micromachined ultrasonic transducer for its exciting sensitivity. A micromachined transducer is modeled as a large width-length ratio clamped-clamped beam, with the piezoelectric film to excite the beam vibration. The exciting sensitivity is taken as the optimization objective. Specifically, when the exciting voltage is fixed, the transducer structure is optimized to maximize the vibrating magnitude of the beam. The shape and the size of the piezoelectric layer are selected as the design parameters to optimize the exciting sensitivity of the transducer. In this paper, three different design variations of the piezoelectric layer structures are explored for the optimization. To perform the analysis and the subsequent optimization, the finite element models of the design options are created using ANSYS. The optimal design and the sensitivity analysis are performed; and the corresponding structural parameters of the piezoelectric film layer for optimal design are identified. Finally, we compare the optimization results of the exciting sensitivity for the large width-length ratio clamped-clamped beam based transducers of these three different piezoelectric layer structures; and the design method to improve the exciting sensitivity of the transducer is provided.

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“…Positioning is one of the key techniques. Currently, optical methods and ultrasonic methods are the two main methods for positioning [1][2][3][4][5][6][7]. Compared with optical sensors, ultrasonic sensors have the advantages of low cost, low power consumption, and low computational complexity [8][9][10].…”

Section: Introductionmentioning

confidence: 99%

A New Positioning Method Based on Multiple Ultrasonic Sensors for Autonomous Mobile Robot

Shen

Wang

Jiang

et al. 2019

Sensors

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This work proposes a new positioning method based on multiple ultrasonic sensors for the autonomous mobile robot. Unlike the conventional ultrasonic positioning methods, this new method can realize higher accuracy ultrasonic positioning without additional temperature information. Three ultrasonic sensors are used for positioning. A generalized measurement model is established for general sensor configuration. A simplified measurement model, which considers the computational complexity, is also established for linear/simplified sensor configuration. Three time-of-flight signals are obtained from the three ultrasonic sensors. The coordinates of the target are calculated by the ratios of time-of-flights. Positioning experiments were carried out to verify the feasibility and effectiveness of the proposed method. Experimental results show that the new ultrasonic positioning method is effective, both the two established models can implement positioning successfully, and the positioning accuracy is satisfactory. Compared with the conventional ultrasonic positioning method with the default ultrasonic velocity, the positioning accuracy is greatly improved by the proposed method. Compared with the ultrasonic positioning method with additional temperature compensation, the results obtained by the proposed method are comparable.Huang and Young presented an accurate ultrasonic distance measurement system which had a self-temperature compensation with the environmental average temperature in space [25]. Although these methods can improve the positioning performance, they need to introduce additional temperature sensors and a calibration process, which make the positioning system more complex.This work aims to propose a new positioning method based on multiple ultrasonic sensors (three sensors in this work). The new method can implement higher accuracy ultrasonic positioning without additional temperature information or calibration process. The coordinates of the target are calculated according to the ratios of three time-of-flights measured by the three ultrasonic sensors, which means the influence of environmental temperature on positioning is avoided. Different from the previous/conventional methods using time-of-flights directly for positioning [12,[20][21][22][23][24][25][26][27], this work features in a novel idea which uses the ratios of time-of-flights to realize ultrasonic positioning and hence to improve the positioning accuracy. Figure 1 shows the basic measurement principle of ultrasonic ranging. New Ultrasonic Positioning Method

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Design and Fabrication of the High Directional Ultrasonic Ranging Sensor to Enhance the Spatial Resolution

Cited by 4 publications

References 2 publications

A micro-machined viscosity-variation monitoring device using propagation of acoustic waves in microchannels

A micro-machined viscosity-variation monitoring device using propagation of acoustic waves in microchannels

FEA Based Design Optimization of Exciting Sensitivity for Micromachined Beam Ultrasonic Transducer

A New Positioning Method Based on Multiple Ultrasonic Sensors for Autonomous Mobile Robot

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