Design and fabrication of SU-8 polymer arrayed waveguide gratings based on flexible PDMS substrates

Abstract

We investigated and fabricated 1 × 8 and 1 × 16 traditional/saddle arrayed waveguide grating (AWG) wavelength division multiplexing devices on flexible substrates. The core layer was made of the negative epoxy photoresist SU-8, and polydimethylsiloxane (PDMS) material was selected for the cladding based on the high refractive index difference. A chemical modification method of PDMS was proposed to enhance the film-forming characteristics of the SU-8 core layer on PDMS substrates. After fabricating and characterizing the optical properties of the AWGs, the dimensions of the proposed 1 × 8 and 1 × 16 AWGs were 0.9 × 0.8 c m 2 and 1.1 × 0.9 c m 2 , respectively. Experimental results showed that the saddle-type 1 × 8 and 1 × 16 AWGs had good signal transmission characteristics, and the insertion losses were only 5.1 dB and 6.8 dB, respectively, which were lower than those of traditional-type AWGs with the same dimensions and number of waveguides.

Skin‐Integrated, Stretchable Electronic Skin for Human Motion Capturing and Pressure Mapping

“…[18,24,25,26] Polydimethylsiloxane (PDMS), also known as silicone, is one of the most widely used flexible substrate. [27,28,29] By integrating with stretchable serpentineshaped electrodes, silicon-based flexible electronics equip with high flexibility and stretchability, which are appropriate to be utilized in wearable piezoresistive pressure sensor. [30,31,32] Combined with layered transition metal carbides, nitrides or carbonitrides, MXene, one new class of 2D materials, was first investigated in 2011.…”