Design and fabrication of piezoelectric nanocomposite structures for microdevice applications

Abstract

Abstract. We present a new group of piezoelectric nanocomposite thin films based on integrating piezoelectric material poly(vinylidene fluoride) and nanoparticles of barium titanate in a matrix of an organic polymer poly(methyl methacrylate). Implementation of piezoelectric properties in designed new nanocomposites allows us not only to increase the sensitivity and functionality of the overall system, where this material is used, but also to expand the application fields in sensing and actuating systems. Results implied that new nanostructures fabricated by nanoimprint lithography exhibit good piezoelectric, surface, and mechanical properties and allow independent control of tribological properties. Formed nanocomposite systems were integrated in designing optical components employed in medicine for sensing applications. © The Authors. Published by SPIE under a Creative Commons Attribution 3.0 Unported License. Distribution or reproduction of this work in whole or in part requires full attribution of the original publication, including its DOI.

Recent Advances on Nanocomposite Resists With Design Functionality for Lithographic Microfabrication

“…As mentioned above, we have found few other examples in the literature of ceramic piezoelectric NCPRs suitable for photolithography (Xu and Wong, 2007;Kim et al, 2014). Structuring of BaTiO 3 NCMs has also been accomplished using other methods (Palevicius et al, 2013;Kim et al, 2019). Lastly, we mention the recent work of Long et al (2020), in which the fabrication of high resolution (∼300 nm) arbitrarily shaped 3D and 2D structures with aligned ZnO NWs through TPL was demonstrated.…”

“…Commercial formulations of PMMA PRs are anisole (type A) or chlorobenzene (type C) based solutions of a methyl methacrylate polymer (495,000 or 950,000 molecular weight) in varying concentrations (2-11 wt%). PMMA has been modified with NFs in several works (Ishii et al, 1997;Vaudreuil et al, 2007;Persano et al, 2012;Palevicius et al, 2013;Martínez et al, 2016;Dusoe et al, 2017;Tiwale et al, 2019). (4) ZEP520, another interesting PR for EBL, is based on the alternating copolymer poly(α-chloroacrylate-coα-methyl styrene) which undergoes chain scission under electron-beam irradiation, therefore acting as a positive tone resist.…”