Design and Fabrication of Micropump Actuated by Laser Shock Wave

Abstract

This paper proposes a novel approach for micropump driven, namely laser shock wave, with the advantages of high energy efficiency, remote control and wireless energy supply. The pump used here has the characteristics of simple structure, easy fabrication and low cost comparing to the traditional micropump. Firstly, a valveless micropump was designed and then manufactured through lithography and bonding. Secondly, modal analysis of the fluid-structure coupling system, i.e. micropump, was calculated, and the first natural frequency was chosen as the frequency of the laser pulse. Finally, experiments were done to validate the feasibility of the driving mode. Results show the new driving mode works well and may provide an alternative approach for microsystem driven.