Design and fabrication of MEMS thermoelectric generators with high temperature efficiency

Huesgen, Till; Woias, Peter; Kockmann, Norbert

doi:10.1016/j.sna.2007.11.032

Cited by 171 publications

(109 citation statements)

References 6 publications

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“…Recent advances in lowpower sensor technology have reduced power requirements to the level of only several milliwatts [1,2], which makes the concept of a self-powered WSN feasible. Some possible energy sources for WSN include photonic energy [3], thermal energy [4] and mechanical energy [5]. These sources can be used to replace or recharge the battery and increase the lifetime and capacity of WSN.…”

Section: Introductionmentioning

confidence: 99%

Design and experimental characterization of a tunable vibration-based electromagnetic micro-generator

Zhu

Roberts²,

Tudor

et al. 2010

Sensors and Actuators A: Physical

161

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a b s t r a c tVibration-based micro-generators, as an alternative source of energy, have become increasingly significant in the last decade. This paper presents a new tunable electromagnetic vibration-based micro-generator. Frequency tuning is realized by applying an axial tensile force to the micro-generator. The dimensions of the generator, especially the dimensions of the coil and the air gap between magnets, have been optimized to maximize the output voltage and power of the micro-generator. The resonant frequency has been successfully tuned from 67.6 to 98 Hz when various axial tensile forces were applied to the structure. The generator produced a power of 61.6-156.6 W over the tuning range when excited at vibrations of 0.59 m s −2 . The tuning mechanism has little effect on the total damping. When the tuning force applied on the generator becomes larger than the generator's inertial force, the total damping increases resulting in reduced output power. The resonant frequency increases less than indicated from simulation and approaches that of a straight tensioned cable when the force associated with the tension in the beam becomes much greater than the beam stiffness. The test results agree with the theoretical analysis presented.

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Section: Introductionmentioning

confidence: 99%

Design and experimental characterization of a tunable vibration-based electromagnetic micro-generator

Zhu

Roberts²,

Tudor

et al. 2010

Sensors and Actuators A: Physical

161

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show abstract

“…In this work, we develop a thermoelectric energy harvester using the commercial CMOS process. The fabrication energy harvester in this work is easier than that of Su et al [13], Huesgen et al [14], Yuan et al [16] and Kouma et al [17]. The output power of the energy harvester in this work exceeds that of Kao et al [18] MEMS devices made by the commercial CMOS process are called CMOS-MEMS technology [19][20][21].…”

Section: Introductionmentioning

confidence: 85%

“…The area of the harvester was 1 mmˆ2.5 mm. The harvester had an output voltage of 1.49 V and an output power of 0.4 µW at the temperature difference of 3.5 K. Huesgen et al [14] fabricated a micro thermoelectric generator using MEMS technology. To enhance the output power, the thermocouples of the generator were made of p-Bi 0.5 Sb 1.5 Te 3 and n-Bi 0.87 Sb 0.13 , in which deposited by thin-film processes with high integration density on the wafer surface.…”

Section: Introductionmentioning

confidence: 99%

Manufacturing and Characterization of a Thermoelectric Energy Harvester Using the CMOS-MEMS Technology

2015

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Abstract:The fabrication and characterization of a thermoelectric energy harvester using the complementary metal oxide semiconductor (CMOS)-microelectromechanical system (MEMS) technology were presented. The thermoelectric energy harvester is composed of eight circular energy harvesting cells, and each cell consists of 25 thermocouples in series. The thermocouples are made of p-type and n-type polysilicons. The output power of the energy harvester relies on the number of the thermocouples. In order to enhance the output power, the energy harvester increases the thermocouple number per area. The energy harvester requires a post-CMOS process to etch the sacrificial silicon dioxide layer and the silicon substrate to release the suspended structures of hot part. The experimental results show that the energy harvester has an output voltage per area of 0.178 mV¨mm´2¨K´1 and a power factor of 1.47ˆ10´3 pW¨mm´2¨K´2.

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“…Direct thermoelectric generators use the Seebeck effect to directly convert temperature differences into an electrical potential between two material pair junctions [48,49]. For maximizing the power generation, a large thermal contact area is required.…”

Section: Thermoelectric Generationmentioning

confidence: 99%

MRI-based communication for untethered intelligent medical microrobots

Sharafi

Olamaei

2015

J Micro-Bio Robot

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Design and fabrication of MEMS thermoelectric generators with high temperature efficiency

Cited by 171 publications

References 6 publications

Design and experimental characterization of a tunable vibration-based electromagnetic micro-generator

Design and experimental characterization of a tunable vibration-based electromagnetic micro-generator

Manufacturing and Characterization of a Thermoelectric Energy Harvester Using the CMOS-MEMS Technology

MRI-based communication for untethered intelligent medical microrobots

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