Design and fabrication of low-deformation micro-bolometers for THz detectors

Liu, Ziji; Liang, Zhiqing; Tang, Wenxuan; Xu, Xiangdong

doi:10.1016/j.infrared.2020.103241

Cited by 15 publications

(11 citation statements)

References 24 publications

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“…Concerning microbolometers, microelectromechanical systems (MEMS) technology shows a promising development trend. They were realized in silicon wafers, where the readout integrated circuits had been prefabricated to employ VOx film as a bolometer active layer, whose changes in the resistance can be detected and converted to the output voltage or current signals [194]. Other routes in microbolometers evolution are related to search of new materials, for instance, La 0.7 Sr 0.3 Mn O3 thin films as active device layers [195], silicon-on-insulator (SOI), CMOS technology employing different Si-based temperature sensors, such as metal-oxide-semiconductor field-effect transistor, pn-junction diode, and various resistors as possible antenna-coupled bolometers [196].…”

Section: Thz Diodes-based Sensing and Microbolometers In Thz Imagingmentioning

confidence: 99%

Roadmap of Terahertz Imaging 2021

Valušis

Lisauskas

Yuan

et al. 2021

Sensors

178

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In this roadmap article, we have focused on the most recent advances in terahertz (THz) imaging with particular attention paid to the optimization and miniaturization of the THz imaging systems. Such systems entail enhanced functionality, reduced power consumption, and increased convenience, thus being geared toward the implementation of THz imaging systems in real operational conditions. The article will touch upon the advanced solid-state-based THz imaging systems, including room temperature THz sensors and arrays, as well as their on-chip integration with diffractive THz optical components. We will cover the current-state of compact room temperature THz emission sources, both optolectronic and electrically driven; particular emphasis is attributed to the beam-forming role in THz imaging, THz holography and spatial filtering, THz nano-imaging, and computational imaging. A number of advanced THz techniques, such as light-field THz imaging, homodyne spectroscopy, and phase sensitive spectrometry, THz modulated continuous wave imaging, room temperature THz frequency combs, and passive THz imaging, as well as the use of artificial intelligence in THz data processing and optics development, will be reviewed. This roadmap presents a structured snapshot of current advances in THz imaging as of 2021 and provides an opinion on contemporary scientific and technological challenges in this field, as well as extrapolations of possible further evolution in THz imaging.

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Section: Thz Diodes-based Sensing and Microbolometers In Thz Imagingmentioning

confidence: 99%

Roadmap of Terahertz Imaging 2021

Valušis

Lisauskas

Yuan

et al. 2021

Sensors

178

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“…Reduced to its essentials, the setup can consist of just four key components: (1) the lens itself: a transparent substrate decorated with large-scale doped graphene fabricated with chemical vapour deposition; 44 (2) a THz source based on optical rectification from, e.g., a zinc telluride crystal 45 to generate an optical beam with a spectrum peaking at 1 THz; (3) a simple ring magnet to set the shape and focal length of the optical beam; (4) a THz beam imager based, for instance, on electro-optical sampling 45 or an array of microbolometers. 46 In practice, it is advantageous to place an additional thin current coil next to the ring magnet for fine tuning of the magnetic field curvature.…”

Section: Experimental Considerationsmentioning

confidence: 99%

Optical magnetic lens: towards actively tunable terahertz optics

et al. 2021

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“…(3) a simple ring magnet to set the focal length and shape of the optical beam; (4) a THz beam imager based, for instance, on electro-optical sampling 42 or an array of microbolometers 43 . In practice, it is advantageous to place an additional thin current loop next to the ring magnet for fine tuning of the magnetic field curvature.…”

Section: Experimental Considerationsmentioning

confidence: 99%