In classic circulators, exterior permanent magnet is used for biasing the ferrite. In the MMICcompatible circulators, self-biased ferrites are needed [1]. To be used as film, the permanent magnet material must have good properties at microwave frequencies. This particular ferrites are hexaferrites and the most commonly used are barium and strontium ferrites.This work deals with the study of barium hexaferrite films high rate deposition. The bulk material deposited has the formula BaFe 12 O 19 . The films are grown on silicon (100) substrate. To increase adhesion and minimise cracks on the ferrite films, we deposit first one or two thin (≈ 1 µm) metallic films. A preliminary study shows that ferrite films deposited on a gold and palladium alloy underlayer are more adhesive than those on silicon. Secondly we use metallic underlayer more compatible with microwave frequencies. It can be Gold (Au), Copper (Cu), Gold on Titanium (Au/Ti) or Copper on Titanium (Cu/Ti). The metallic layers play also a role of ground plane in the circulator circuit (see figure 1). The Ti layer is used to improve adhesion of Au or Cu layers on silicon (100) substrate. The metallic layers are grown by dc cathodic magnetron sputtering. Figure 1 : Circulator's topologyThe technology used to deposit the Ba-M ferrite is electron beam evaporation which allows high deposition rates [2]. Indeed, acceptable coating thickness for circulator operating at lower millimeter wave frequencies should approach 100 µm to obtain low losses [3]. The growth rates obtained are typically in the 1 to 40 µm per hour range depending on deposition parameters.The growth parameters studied are deposition rate, oxygen flow, substrate temperature and post-deposition annealing. The effect of these parameters on crystallographic structure, magnetic properties, morphology and composition has been investigated.The crystallographic structure is analysed by XRD with a SIEMENS generator equipped with a goniometer. The saturation magnetisation (4πM s ), coercive field (H c ) and remanent ratio (RR) are measured using a hysteresismeter M2100 with a DC magnetic field applied in the film plane. Morphology and composition of the deposited films are measured by Scanning Electron Microscopy (SEM) equipped with a X-Ray Dispersion analysis system. 5 : circuit's ground plane 4 : substrate 3 : circulator's ground plane 2 : ferrite film 1 : top armature Interface Controlled Materials. Edited by M. Rühle and H. Gleiter