Design and fabrication of lithium niobate asymmetrical mode resonators toward C-band and Ku-band
Jicong Zhao,
Xinyi Sun,
Aoyu Zhang
et al.
Abstract:This work presents a laterally excited bulk wave resonator (XBAR) based on the suspended Z-cut lithium niobate thin film. In order to systematically analyze the influence of geometric structure on the performance of resonators, including electromechanical coupling coefficient (kt2) and quality factor (Q), the pitch of inter-digital transducers (IDTs) and lateral reflective boundary width (D) were optimized via finite element analysis (FEA) simulation. Besides, the XBARs with the broadband piston mode structure… Show more
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