Design and fabrication of infrared detector arrays for satellite attitude control

Herwaarden, A.W. van; Herwaarden, F.G. van; Molenaar, S.A.; Goudena, E.J.G.; Laros, M.; Sarro, P.M.; Schot, C.A.; Vlist, W. van der; Blarre, Ludovic; Krebs, J. P.

doi:10.1016/s0924-4247(00)00348-4

Cited by 19 publications

(5 citation statements)

References 4 publications

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“…9 Briefly, the basic pixel has a size of 1×1 mm 2 and consists of an approximately 500 nm thick, 720×720 µm 2 , SiN membrane supported at the 4 edges by 280 µm wide silicon separation beams. At the centre a THz absorbing layer of 500×500 µm 2 is deposited.…”

Section: Design and Fabricationmentioning

confidence: 99%

<title>Some properties of a room temperature THz detection array</title>

et al. 2006

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Detection peculiarities of an un-cooled (room temperature) 8×8 pixel array designed to image broadband THz radiation were investigated. Each pixel consists of a thin conductive film absorber on a dielectric membrane with thermopile temperature readout. It was designed and tested for four combinations of two different types of absorber and thermopile materials. The photo-response profile, determined by scanning the pixels through the focus of a THz laser beam, was wider than expected from a 2-D convolution of the Gaussian beam and the absorber surface. Also the time response did depend on the position of the beam relative to the pixel. Simulations show that those properties are due to the fact that also the thermopiles absorb THz radiation. For the best composition of absorber and thermopile, the responsivity, the noise equivalent power, and the bandwidth were estimated to be of 28 V/W, 5×10 -9 W/Hz 1/2 and 50 Hz, respectively.

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Section: Design and Fabricationmentioning

confidence: 99%

<title>Some properties of a room temperature THz detection array</title>

et al. 2006

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“…By integrating the four ISA arrays in one chip, the blind spot in the middle can be reduced further than by using four separate array chips. This led to the design and fabrication of the focal plane array (FPA) detector [4], shown in Fig. 4.…”

Section: Attitude Control Of Satellite Platformsmentioning

confidence: 99%

“…The modeling led to a few different alternatives which were then fabricated and measured [4]. In particular, we tried two different designs with a single array of 32 pixels and one with two staggered arrays of 16 pixels (called ISA).…”

Section: Redesign Considerationsmentioning

confidence: 99%

Low-cost satellite attitude control sensors based on integrated infrared detector arrays

Herwaarden¹

2001

IEEE Trans. Instrum. Meas.

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Abstract-This paper describes attitude control systems (ACS) for satellites and a new, static system based on an integrated infrared (IR) detector array. After a short introduction on the use and control of satellites in general, we explain the advantage of static systems, made possible by the use of integrated IR detector arrays. In particular, the static system is lighter and smaller than the previous systems, and requires less power. The electronics is updated to state-of-the art, increasing the autonomy of the system and thereby reducing its dependence upon the satellite microcontroller.The detectors are based on a bipolar silicon process for the mechanical structure (using electrochemically controlled etching (ECE)-potassuim hydroxide (KOH) etching), with an SiN membrane for thermal isolation of the pixels, which have a polymer black coating for transduction of radiation to heat and n-type

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“…Today, micromachined thermopile-type thermal IR detectors can be found in a number of applications in both the military and civil domains, including security systems, remote temperature sensing and consumer electronic products [1][2][3]. Although they cannot compete with resistive bolometers as in the case of IR imaging chips and do not have the high responsivities of pyroelectric detectors [4], micromachined thermopiles are still attractive in many applications due to their simple system design.…”

Section: Introductionmentioning

confidence: 99%

Design, fabrication and characterization of a front-etched micromachined thermopile for IR detection

Xiong

Wang

2010

J. Micromech. Microeng.

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This paper presents the design, fabrication and experimental results of a front-etched CMOS compatible micromachined thermopile IR detector. The N-polysilicon/Al thermocouples were embedded in a 2.5 μm thick SiO 2 -Si 3 N 4 -SiO 2 sandwich membrane, and XeF 2 front-side isotropic post-etching was adopted to release and thermally isolate the thermopile structure. Due to the isotropy of XeF 2 etching, a lot of flexibility was allowed in etching window layout and thermopile structure design. Etching windows in the dielectric absorber area were designed to avoid cutting off the heat transfer path from the absorber to hot junctions, and aluminum strips were patterned in the absorber to ensure the temperature was uniform across the absorber area. Two different thermopile structures, circle and rectangle, were designed and fabricated to investigate detector performance with respect to the thermopile structure. The steady-state behavior of fabricated detectors was anticipated by thermal ANSYS simulation. Due to the fact that the circular structure can get a higher temperature difference between hot and cold junctions, the circular thermopile detector has a quicker response, two times higher responsivity and detectivity than the rectangular thermopile detector. The circular thermopile detector exhibits a responsivity of 102.0 V W −1 , a detectivity of 9.2 × 10 7 cm Hz 1/2 W −1 and a time constant of 16.8 ms, in air at room temperature.

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Design and fabrication of infrared detector arrays for satellite attitude control

Cited by 19 publications

References 4 publications

<title>Some properties of a room temperature THz detection array</title>

<title>Some properties of a room temperature THz detection array</title>

Low-cost satellite attitude control sensors based on integrated infrared detector arrays

Design, fabrication and characterization of a front-etched micromachined thermopile for IR detection

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