Design and Fabrication of Highly Manufacturable Microelectromechanical Systems Test Sockets for Ball Grid Array Integrated Circuit Packages

Abstract

An InGaN laser diode operating at 398 nm and with output facet coated with a multi-layer anti-reflection coating has been operated within Littrow external cavities. A maximum manual tuning range of 6.3 nm has been achieved and a continuous tuning range of 0.8 GHz with a single piezo control. Stable single-longitudinal-mode operation has been obtained with a linewidth less than 11 MHz. The effects on total tuning range due to the orientation of the diode output facet within the Littrow cavity are discussed.