Design and fabrication of high performance condenser microphone using C-slotted diaphragm

Ganji, Bahram Azizollah; Sedaghat, Sedighe Babaei; Roncaglia, Alessandro; Belsito, Luca

doi:10.1007/s00542-018-3816-3

Cited by 6 publications

(4 citation statements)

References 19 publications

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“…Therefore, the sensitivities of the two are similar, and the difference of parameters is mainly caused by the parameters of the membrane. The experimental results of the condenser microphones prepared in [32] and [33] differ greatly. Compared with the results measured in [32], the displacement, collapse voltage, and sensitivity in [33] are 19.6, 0.2, and 15.8 times higher, respectively.…”

Section: Comparison and Discussionmentioning

confidence: 99%

“…The experimental results of the condenser microphones prepared in [32] and [33] differ greatly. Compared with the results measured in [32], the displacement, collapse voltage, and sensitivity in [33] are 19.6, 0.2, and 15.8 times higher, respectively. These changes are mainly due to the C-shaped grooves on the edge of the wafer perforated diaphragm.…”

Section: Comparison and Discussionmentioning

confidence: 99%

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Research on Novel CMUTs for Detecting Micro-Pressure with Ultra-High Sensitivity and Linearity

et al. 2021

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Capacitive micromachined ultrasonic transducers (CMUTs) have been indispensable owing to their resonance characteristics in the MHz frequency range. However, the inferior pressure sensitivity and linearity of traditional CMUTs themselves cannot meet the actual demands of micro-pressure measurements. In this paper, two novel CMUTs are proposed for the first time to improve the measuring performance of micro-pressure in the range of 0–10 kPa. The core concept of the enhancement is strengthening membrane deformability by partly adjusting the CMUT framework under the combined action of electrostatic force and uniform pressure. Two modified structures of an inverted frustum cone-like cavity and slotted membrane are presented, respectively, and a finite element model (FEM) of CMUT was constructed and analyzed using COMSOL Multiphysics 5.5. The results demonstrate that the maximum displacement and pressure sensitivity are improved by 16.01% and 30.79% for the frustum cone-like cavity and 104.22% and 1861.31% for the slotted membrane, respectively. Furthermore, the results show that the width uniformity of the grooves does not influence the characteristics of the membrane, which mainly depend on the total width of the grooves, greatly enriching design flexibility. In brief, the proposed structural designs can significantly improve the micro-pressure measurement performance of the CMUT, which will accelerate the rapid breakthrough of technical barriers in the fields of aerospace, industry control, and other sensing domains.

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Section: Comparison and Discussionmentioning

confidence: 99%

Section: Comparison and Discussionmentioning

confidence: 99%

Research on Novel CMUTs for Detecting Micro-Pressure with Ultra-High Sensitivity and Linearity

et al. 2021

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“…Since miniaturized electroacoustic transducers with perforated moving electrodes have appeared in literature in recent years [1][2][3][4][5], the need for the precise theoretical modeling of such devices has increased significantly. Such a model taking into account the coupling of the acoustic pressure inside the transducer with the movement of the moving electrode and with the incident acoustic pressure through the perforation (causing the acoustic short circuit in the lower frequency range) as well as the thermoviscous losses originating in the narrow regions behind the moving electrode has been published recently [6].…”

Section: Introductionmentioning

confidence: 99%

Modeling Aspects of Miniaturized Microphones with perforated Moving Electrodes

Honzik,

imonová

2024

Proceedings of the 10th Convention of the European Acoustics Association Forum Acusticum 2023

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Miniaturized electroacoustic transducers whose moving electrodes are perforated for technological reasons have appeared in the literature recently. Since the perforation influences strongly the frequency response of the microphones, particularly at lower frequency range due to the acoustic short circuit, the precise modeling of such devices is of high interest. This contribution presents the analytical modeling aspects and theoretical results using the porosity approach. The effects of viscous and thermal boundary layers and the coupling of the displacement field of the moving electrodes in form of perforated plate (flexible clamped at all boundaries or rigid elastically supported) with the acoustic field inside the device are taken into account. The approximated analytical results are compared to the reference numerical (FEM) ones. The benefits and drawbacks of the analytical method are discussed.

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“…However, new designs presenting technological advances have been proposed recently in the literature, such as a microphone with moving microbeam [ 12 ], or transducers (sources and microphones) with perforated moving electrodes. The mean motivation for the work presented herein is the latter case with electrodes in the form of elastic perforated plates clamped at all boundaries [ 13 ] or rigid elastically supported perforated plates [ 14 , 15 , 16 , 17 ]. Although these experimental studies contain approximate theoretical models, mainly based on the lumped elements approach, the precise analytical modeling is still of high interest.…”

Section: Introductionmentioning

confidence: 99%

Modeling of MEMS Transducers with Perforated Moving Electrodes

Simonova

Honzík

2023

Micromachines

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Microfabricated electroacoustic transducers with perforated moving plates used as microphones or acoustic sources have appeared in the literature in recent years. However, optimization of the parameters of such transducers for use in the audio frequency range requires high-precision theoretical modeling. The main objective of the paper is to provide such an analytical model of a miniature transducer with a moving electrode in the form of a perforated plate (rigid elastically supported or elastic clamped at all boundaries) loaded by an air gap surrounded by a small cavity. The formulation for the acoustic pressure field inside the air gap enables expression of the coupling of this field to the displacement field of the moving plate and to the incident acoustic pressure through the holes in the plate. The damping effects of the thermal and viscous boundary layers originating inside the air gap, the cavity, and the holes in the moving plate are also taken into account. The analytical results, namely, the acoustic pressure sensitivity of the transducer used as a microphone, are presented and compared to the numerical (FEM) results.

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Design and fabrication of high performance condenser microphone using C-slotted diaphragm

Cited by 6 publications

References 19 publications

Research on Novel CMUTs for Detecting Micro-Pressure with Ultra-High Sensitivity and Linearity

Research on Novel CMUTs for Detecting Micro-Pressure with Ultra-High Sensitivity and Linearity

Modeling Aspects of Miniaturized Microphones with perforated Moving Electrodes

Modeling of MEMS Transducers with Perforated Moving Electrodes

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