2011
DOI: 10.1143/jjap.50.07hd02
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Design and Fabrication of Fresnel Lens and ZnO Thin-Film Transducer

Abstract: A four-level Fresnel lens and piezoelectric transducer were fabricated as an ejector using focused ultrasonic energy. The influence of the fabrication parameters on the profile of the focusing lens was investigated. Highly c-axis (002)-oriented ZnO films were successfully deposited on Pt (annealed)/Ti/SiO2/Si substrates under reasonable conditions, such as RF power of 178 W, substrate temperature of 380 °C, deposition pressure of 10 mTorr, and Ar:O2 gas flow ratio of 50%. These conditions were applied and conf… Show more

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Cited by 7 publications
(2 citation statements)
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References 23 publications
(34 reference statements)
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“…Therefore, the c-axis tilted ZnO layer is grown instead of the c-axis normal layer, because the sputtered particles tilt to the substrate plane. 24,25) The ZnO transducer with the c-axis tilted ZnO/c-axis normal ZnO multilayer thus can be fabricated continuously without changing the conditions during the deposition.…”
Section: Transducer Characterizationmentioning
confidence: 99%
“…Therefore, the c-axis tilted ZnO layer is grown instead of the c-axis normal layer, because the sputtered particles tilt to the substrate plane. 24,25) The ZnO transducer with the c-axis tilted ZnO/c-axis normal ZnO multilayer thus can be fabricated continuously without changing the conditions during the deposition.…”
Section: Transducer Characterizationmentioning
confidence: 99%
“…Annular array transducers have already been developed for nondestructive testing, medical uses, and industrial applications. [1][2][3][4][5][6][7][8] Various lens types, such as the curved type, [2][3][4][5][6] flat type, 7) and step height type, 8) have been developed to obtain effective focusing. They consist of a number of equal-area elements and allow the focal point to be shifted by electrical control.…”
Section: Introductionmentioning
confidence: 99%